Characterization study on machining PMMA thin‐film using AFM tip‐based dynamic plowing lithography

He, Yang; Geng, Yanquan; Hu, Zhenjiang; Zhao, Xuesen

doi:10.1002/sca.21308

Cited by 12 publications

(5 citation statements)

References 17 publications

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“…To date, nanodots/pits, nanogrooves/lines, and even three-dimensional (3D) complex structures have been achieved on these films by using the TBN method. Various types of nanomachining methods based on tips involving static scratch [33][34][35], DPL [9,13,14,36,37], and vibration-assisted approach [22,[38][39][40][41][42][43][44][45][46], especially the ultrasonic vibration-assisted (UV-assisted) method, have been used to machine nanopatterns on polymer films (Table 1). Heated tips have been found to offer important advantages in machining polymer film materials.…”

Section: Machining On Polymer Thin Filmsmentioning

confidence: 99%

“…Therefore, machining on soft polymer films that are spin-coated on the surface of hard substrates first and subsequently transferred to the target hard substrates via etching may be a good approach to reducing tip wear. Nanopatterns of varying dimensions, including nanopits/dots [9,13], nanogrooves/lines [14,15], and bundles [16], have been achieved on polymer films via TBN and have been applied to data storage [17], etch masks [18], sacrificial layers for lift-off [19], and so on. As for machining on metal films, numerous TBN methods have been employed, and they include constant force mode [20], dynamic plowing lithography (DPL) [21], phase mode nanofabrication [22], vibration-assisted nanomachining [23], AFM electric lithography [24], and coupling AFM lithography [25].…”

Section: Introductionmentioning

confidence: 99%

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Tip-Based Nanomachining on Thin Films: A Mini Review

Chang

Geng

2021

Nanomanuf Metrol

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As one of the most widely used nanofabrication methods, the atomic force microscopy (AFM) tip-based nanomachining technique offers important advantages, including nanoscale manipulation accuracy, low maintenance cost, and flexible experimental operation. This technique has been applied to one-, two-, and even three-dimensional nanomachining patterns on thin films made of polymers, metals, and two-dimensional materials. These structures are widely used in the fields of nanooptics, nanoelectronics, data storage, super lubrication, and so forth. Moreover, they are believed to have a wide application in other fields, and their possible industrialization may be realized in the future. In this work, the current state of the research into the use of the AFM tip-based nanomachining method in thin-film machining is presented. First, the state of the structures machined on thin films is reviewed according to the type of thin-film materials (i.e., polymers, metals, and two-dimensional materials). Second, the related applications of tip-based nanomachining to film machining are presented. Finally, the current situation of this area and its potential development direction are discussed. This review is expected to enrich the understanding of the research status of the use of the tip-based nanomachining method in thin-film machining and ultimately broaden its application.

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Section: Machining On Polymer Thin Filmsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Tip-Based Nanomachining on Thin Films: A Mini Review

Chang

Geng

2021

Nanomanuf Metrol

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“…Moreover, AFM can fabricate features on most materials. AFM nanolithography has two modes, namely static and dynamic plowing lithography (DPL), which are derived from contact [12][13][14][15][16][17] and tapping scanning modes [18][19][20][21], respectively. In static plowing lithography, which is also known as AFM scratching, the probe tip applies a constant normal force on the surface of the sample to be processed.…”

Section: Introductionmentioning

confidence: 99%

“…The machined depth achieved with DPL is generally several nanometers, and the ridge-to-ridge width is approximately 40 nm [20]. A groove with a 17 nm mouth width [21], where the depth is measured, was obtained with optimized DPL parameters. In addition, the pile-up generated by DPL was shown to be nearly equal to the removed material in [23].…”

Section: Introductionmentioning

confidence: 99%

Fabrication of periodic nanostructures using dynamic plowing lithography with the tip of an atomic force microscope

Yan

Geng

et al. 2018

Applied Surface Science

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The fabrication of periodic nanostructures with a fine control of their dimensions is performed on poly(methyl methacrylate) (PMMA) thin films using an atomic force microscope technique called dynamic plowing lithography (DPL). Different scratching directions are investigated first when generating single grooves with DPL. In particular, the depth, the width and the periodicity of the machined grooves as well the height of the pileup , formed on the side of the grooves, are assessed. It was found that these features are not significantly affected by the scratching direction, except when processing took place in a direction away from the cantilever probe and parallel to its main axis. For a given scratching direction, arrays of regular grooves are then obtained by controlling the feed, i.e. the distance between two machining lines. A scan-scratch tip trace is also used to reduce processing time and tip wear. However, irregular patterns are created when combining two layers oriented at different angles and where each layer defines an array of grooves. Thus, a "combination writing" method was implemented to fabricate arrays of grooves with a well-defined wavelength of 30 nm, which was twice the feed value utilized. Checkerboard, diamond-shaped, and hexagonal nanodots were also fabricated. These were obtained by using the combination writing method and 2 by varying the orientation and the number of layers. The density of the nanodots achieved could be as high as 1.9×10 9 nanodots per mm 2 .

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“…The sample can be written by changing the modulation amplitude [ 6 ]. The precise control of vibration amplitude is a key factor in keeping the accuracy of patterning depth [ 7 ]. The distance between the cantilever and the sample surface during the nanolithography process is very small, and usually on the order of micrometers [ 8 ].…”

Section: Introductionmentioning

confidence: 99%

Squeeze Film Air Damping in Tapping Mode Atomic Force Microscopy

et al. 2017

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In dynamic plowing lithography, the sample surface is indented using a vibrating tip in tapping mode atomic force microscopy. During writing, the gap between the cantilever and the sample surface is very small, usually on the order of micrometers. High vibration frequency and small distance induce squeeze film air damping from the air in the gap. This damping can cause variations in the cantilever’s vibrating parameters and affect the accuracy of the nanoscale patterning depth. In this paper, squeeze film air damping was modeled and analyzed considering the inclined angle between the cantilever and the sample surface, and its effects on the resonant amplitude and damping coefficient of the cantilever were discussed. The squeeze film air damping in the approaching curve of cantilever was observed, and its effect on fabricating nanopatterns was discussed.

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Characterization study on machining PMMA thin‐film using AFM tip‐based dynamic plowing lithography

Cited by 12 publications

References 17 publications

Tip-Based Nanomachining on Thin Films: A Mini Review

Tip-Based Nanomachining on Thin Films: A Mini Review

Fabrication of periodic nanostructures using dynamic plowing lithography with the tip of an atomic force microscope

Squeeze Film Air Damping in Tapping Mode Atomic Force Microscopy

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