2009
DOI: 10.1115/1.3130443
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Characterization of Young’s Modulus of Nanowires on Microcantilever Beams

Abstract: A new approach to measure the elastic modulus of nanowires is presented in this paper using a nanowire and a microcantilever beam composite system. The mechanical behavior of a nanowire-microcantilever beam structure under electrostatic actuation was studied using the finite element method, and a comparison of the resonance frequencies for a nanowire-microcantilever composite beam structure and a microcantilever beam only is presented. The test system can be optimized by introducing arrays of nanowires to incr… Show more

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Cited by 4 publications
(2 citation statements)
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“…[10][11][12][13][14][15][16][17] As the critical issues of mechanical performance of microcantilevers, Young's modulus [18][19][20][21][22][23] and resonant frequency [24][25][26][27][28][29][30][31] have been studied by various characterizations. In this research, atomic force microscopy (AFM) measurement is conducted to characterize resonant frequency of multi-layer microcantilevers, and a theoretical model is proposed and discussed including the impact of coating on both Young's modulus and resonant frequency.…”
Section: © 2017 Author(s) All Article Content Except Where Otherwismentioning
confidence: 99%
“…[10][11][12][13][14][15][16][17] As the critical issues of mechanical performance of microcantilevers, Young's modulus [18][19][20][21][22][23] and resonant frequency [24][25][26][27][28][29][30][31] have been studied by various characterizations. In this research, atomic force microscopy (AFM) measurement is conducted to characterize resonant frequency of multi-layer microcantilevers, and a theoretical model is proposed and discussed including the impact of coating on both Young's modulus and resonant frequency.…”
Section: © 2017 Author(s) All Article Content Except Where Otherwismentioning
confidence: 99%
“…As one of the most important parameters for materials in engineering, elastic modulus has been intensively studied especially in the field of metal and its alloys [1]. Due to its vitality, researchers have developed many methods either to measure it experimentally or predict it theoretically, not only for bulk specimens [2] but also for film/substrate systems [3,4] and even nanowires [5]. Born and Huang first proposed the temperature-dependent theory of modulus [6], and their theory adopted the Mie-Gr€ uneisen state equations and used the interparticle potential energy to directly express the isothermal bulk modulus.…”
Section: Introductionmentioning
confidence: 99%