Characterization of vertical vibration of electrostatically actuated resonators using atomic force microscope in noncontact mode

Agache, Vincent; Legrand, Bernard; Nakamura, Kiyoshi; Kawakatsu, Hideki; Buchaillot, L.; Toshiyoshi, Hiroshi; Collard, Dominique; Fujita, Hiroshi

doi:10.1109/sensor.2005.1497499

Cited by 8 publications

(7 citation statements)

References 11 publications

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“…Here, the offset slit electrodes increase the operational range of the devices, which is usually limited by the pullin instability. Resonant operation of a nanoscale cantilever using fringing fields, provided by two symmetric electrodes fabricated using the same layer as the beam, was demonstrated in [37]. Parametric excitation of cantilever and double-clamped beams by the fringing fields in a single layer device and in absence of a substrate was demonstrated theoretically and experimentally in [38].…”

Section: Introductionmentioning

confidence: 99%

Bistability of curved microbeams actuated by fringing electrostatic fields

2011

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In this work we investigate the feasibility of two-directional switching of an initially curved or pre-buckled electrostatically actuated microbeams using a single electrode fabricated from the same structural layer. The distributed electrostatic force, which is engendered by the asymmetry of the fringing fields in the deformed state, acts in the direction opposite to the deflection of the beam and can be effectively viewed as a reaction of a nonlinear elastic foundation with stiffness parameterized by the voltage. The reduced order model was built using the Galerkin decomposition with linear undamped modes of a straight beam as base functions and verified using the results of the numerical solution of the differential equation. The electrostatic force was approximated by means of fitting the results of three-dimensional numerical solution of the electrostatic problem. Static stability analysis reveals that the presence of the restoring electrostatic force may result in the suppression of the snapthrough instability as well as in the appearance of additional stable configurations associated with higher buckling modes of the beam that are not observed in "mechanically" loaded structures. We show that two-directional switching of a pre-buckled beam between two stable configurations cannot be achieved using quasistatic loading. Furthermore, we show that switching is both associated with the dynamic snapthrough mechanism and possible within certain interval of actuation voltages. Using a single-degree-offreedom (lumped) model, estimation voltage boundaries are obtained. Theoretical results illustrate the feasibility of the suggested operational principle as an efficient mechanism in the arena of non-volatile mechanical memory devices.

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Section: Introductionmentioning

confidence: 99%

Bistability of curved microbeams actuated by fringing electrostatic fields

2011

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“…How can we verify that the amplitude detected is due to a large movement of the SMR surface or a dynamic influence of the liquid? A more straightforward experiment is conducted with a “single-frequency method” [ 14 , 21 ] in tapping mode in fluid. The idea of vibration amplitude measurement is shown in Figure 4 a.…”

Section: Experimental Results and Analysismentioning

confidence: 99%

“…The fundamental resonance mode was found to be 2.75 MHz with a quality factor of 6 and the peak amplitude is ~230 nm [ 13 ]. Two years later, a simple and direct method based on AFM operating in tapping mode was demonstrated to characterize the vibration amplitude of electrostatically-actuated MEMS resonators with the resonant frequency of 6.35 MHz and the corresponding amplitude of 90 nm [ 14 ]. The above two methods are suitable for a relatively stronger vibration, i.e., generally larger than 20 nm.…”

Section: Introductionmentioning

confidence: 99%

Mechanical Vibration Measurement of Solidly Mounted Resonator in Fluid by Atomic Force Microscopy

Guo

Duan

et al. 2017

Micromachines

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The very small vibration of a solidly-mounted resonator (SMR) in fluid may trigger a relatively large motion of the covering fluid, which was implied by our protein-related experimental results. Therefore, a series of experimental methods for characterizing the mechanical longitudinal vibration of the SMR and the corresponding out-of-plane dynamic response of the fluid above the SMR surface is described in this paper. A SMR device with theoretical resonance frequency of 2.5 GHz was driven by an amplitude-modulated (AM) signal, in which the amplitude is modulated by a signal of the second resonance frequency of the atomic force microscope (AFM) cantilever. A lock-in amplifier is used to demodulate the vibration response of the AFM cantilever, which is proportional to the amplitude of the sample vibration in contact mode and tapping mode. The amplitude-frequency curve of the SMR surface is obtained in contact mode with a relatively stronger interaction force between the AFM tip and the SMR surface. The amplitude-frequency curve of the motion of the liquid above the SMR device and the peak amplitude of the fluid at different distances above the SMR surface are measured in tapping mode with a relatively weak interaction force between the AFM tip and the fluid sample.

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“…It is worth to mention that actuators relying on electric fringingfields were previously used as resonant tilting micro devices [12,29,30] especially for scanning applications, non-contact mode Atomic Force Microscope (AFM) [31], and Scanning Electrostatic Force Microscopy (SEFM) [32]. Non-contact offset slits electrostatic microactuator configuration, where a mobile slit were located at a certain offset from two stationary electrodes, was presented in Refs.…”

Section: Introductionmentioning

confidence: 99%

Numerical model for the calculation of the electrostatic force in non-parallel electrodes for MEMS applications

Ouakad

2015

Journal of Electrostatics

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Characterization of vertical vibration of electrostatically actuated resonators using atomic force microscope in noncontact mode

Cited by 8 publications

References 11 publications

Bistability of curved microbeams actuated by fringing electrostatic fields

Bistability of curved microbeams actuated by fringing electrostatic fields

Mechanical Vibration Measurement of Solidly Mounted Resonator in Fluid by Atomic Force Microscopy

Numerical model for the calculation of the electrostatic force in non-parallel electrodes for MEMS applications

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