2011
DOI: 10.1186/1556-276x-6-152
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Characterization of silicon heterojunctions for solar cells

Abstract: Conductive-probe atomic force microscopy (CP-AFM) measurements reveal the existence of a conductive channel at the interface between p-type hydrogenated amorphous silicon (a-Si:H) and n-type crystalline silicon (c-Si) as well as at the interface between n-type a-Si:H and p-type c-Si. This is in good agreement with planar conductance measurements that show a large interface conductance. It is demonstrated that these features are related to the existence of a strong inversion layer of holes at the c-Si surface o… Show more

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Cited by 20 publications
(18 citation statements)
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“…14,15 Until now, the inversion layer has been considered only as a tool to characterize the band offsets at the a-Si:H/c-Si interface 16,17 and its influence on lateral transport in operating devices has not yet been analyzed. Lateral transport through an inversion layer is successfully leveraged in modulationdoped field-effect transistors 18 and in metal-insulatorconductor inversion layer solar cells.…”
Section: Introductionmentioning
confidence: 99%
“…14,15 Until now, the inversion layer has been considered only as a tool to characterize the band offsets at the a-Si:H/c-Si interface 16,17 and its influence on lateral transport in operating devices has not yet been analyzed. Lateral transport through an inversion layer is successfully leveraged in modulationdoped field-effect transistors 18 and in metal-insulatorconductor inversion layer solar cells.…”
Section: Introductionmentioning
confidence: 99%
“…The double heterojunction structures (p)a‐Si:H/(n)c‐Si/(n)a‐Si:H were simulated with typical values for the c‐Si and a‐Si:H material parameters, whereas the thicknesses and doping level corresponded to the experimental samples. The values of conduction and valence band offsets were set equal to 0.15 and 0.45 eV, respectively . For the reference sample, a low bulk defect density (5 × 10 9 cm −3 ) was introduced in c‐Si, which corresponds to a high lifetime value in bulk silicon (2 ms).…”
Section: Resultsmentioning
confidence: 99%
“…It is clear that the R S of our film is 3 to 7 times lower than the calculated values, indicating either a better film quality in our conditions than in previously reported data, a higher doping than expected, or a conduction path in the silicon due to an inversion region. [15] We can notice that the sheet resistance hardly decreases when the thickness increases from 10 to 20 nm. The GaP n-type doping comes from Si diffusion from the substrate which is not optimized yet.…”
Section: Electrical Measurementsmentioning
confidence: 87%