Characterization of diamondlike carbon by infrared spectroscopy?

Abstract

Comparison of Fourier transform infrared (FTIR) absorption spectroscopy, high resolution 13C nuclear magnetic resonance spectroscopy, and hydrogen evaluation by forward recoil elastic scattering (FRES) measurements shows that FTIR cannot be used to determine the carbon hybridization or total hydrogen content of diamondlike carbon films (DLC). FTIR absorption reflects only the optically active hydrogen in the DLC and, using it together with FRES, it can provide an estimate of the unbound hydrogen contained in the films. The fraction of unbound hydrogen can reach values of up to ∼50%.

Effects of Deposition Temperature on Low-Dielectric Fluorinated Amorphous Carbon Films for Ultralarge-Scale Integration Multilevel Interconnects

“…Thus, interlayer dielectric film technology has become an area of intense research interest in ultralarge-scale integration (ULSI) applications (1,2). Fluorinated amorphous carbon (a-C:F) film has received increased attention as a possible low-dielectric interlayer for ULSI multilevel interconnections owing to its low dielectric constant, thermal stability, and crosslinked polytetrafluoroehthylene (PTFE)-like structures (3,4).…”

Electron paramagnetic resonance and raman spectroscopy characterization of diamond films fabricated by HF CVD method

“…The presence of H in diamond lattice has serious influence on its physical characteristics. In spite of this, there were very few attempts to measure the concentration and the bonding of H in CVD diamond lattice [18][19][20][21][22].…”

Influence of hydrogen atoms on the growth of carbon based nanoparticles and of thin films from reactive plasmas

“…Due to unknown oscillator strengths for each CH n unit the infrared spectra are not used for a quantitative calculation of the hydrogen content and distribution but only for observing the qualitative spectral changes [25,26] due to different microstructures. Basically two mistakes can be made.…”