Characterization of a MEMS-Based Embedded Non Volatile Memory Array for Extreme Environments

Zambelli, Cristian; Olivo, P.; Gaddi, R.; Schepens, Cor; Smith, Charles G.

doi:10.1109/imw.2011.5873214

Cited by 6 publications

(3 citation statements)

References 6 publications

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“…Also in this framework, MEMS open important possibilities. For example, MEMS-based non-volatile memory arrays were recently developed by assembling a NanoMech TM MEMS switch from Cavendish Kinetics (‘s-Hertogenbosch, The Netherlands), designed by using a 0.35 μm CMOS technology with four metal layers, and proposed for applications in extreme environments [ 121 ].…”

Section: Mems-based Sensor Technologies For Human Centred Applicatmentioning

confidence: 99%

MEMS Sensor Technologies for Human Centred Applications in Healthcare, Physical Activities, Safety and Environmental Sensing: A Review on Research Activities in Italy

Ciuti

Ricotti

Menciassi

et al. 2015

Sensors

130

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Over the past few decades the increased level of public awareness concerning healthcare, physical activities, safety and environmental sensing has created an emerging need for smart sensor technologies and monitoring devices able to sense, classify, and provide feedbacks to users’ health status and physical activities, as well as to evaluate environmental and safety conditions in a pervasive, accurate and reliable fashion. Monitoring and precisely quantifying users’ physical activity with inertial measurement unit-based devices, for instance, has also proven to be important in health management of patients affected by chronic diseases, e.g., Parkinson’s disease, many of which are becoming highly prevalent in Italy and in the Western world. This review paper will focus on MEMS sensor technologies developed in Italy in the last three years describing research achievements for healthcare and physical activity, safety and environmental sensing, in addition to smart systems integration. Innovative and smart integrated solutions for sensing devices, pursued and implemented in Italian research centres, will be highlighted, together with specific applications of such technologies. Finally, the paper will depict the future perspective of sensor technologies and corresponding exploitation opportunities, again with a specific focus on Italy.

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Section: Mems-based Sensor Technologies For Human Centred Applicatmentioning

confidence: 99%

MEMS Sensor Technologies for Human Centred Applications in Healthcare, Physical Activities, Safety and Environmental Sensing: A Review on Research Activities in Italy

Ciuti

Ricotti

Menciassi

et al. 2015

Sensors

130

View full text Add to dashboard Cite

show abstract

“…~ 5 nm or less), the Van der Waals adhesion force (F ad ) will come into effect [7]. Magnitude of F r and F ad are calculated as [7,9]:…”

Section: A Device Structure and Operating Principlesmentioning

confidence: 99%

A Cantilever-Based NEM Nonvolatile Memory Utilizing Electrostatic Actuation and Vibrational Deactuation for High-Temperature Operation

Gopal

Tuan

Singh

et al. 2014

IEEE Trans. Electron Devices

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This paper proposes a cantilever-based memory structure for storing binary data at extreme operating temperature (up to 300 C) in rugged electronics. The memory bit (0/1) is formed by opening/closing of an electrostatic switch. Permanent retention is obtained by adhesive force between two smooth surfaces in contact, eliminating leakage observed in all types of storage-layer-based NVMs. The Reset utilizes a train of short pulses to break the adhesion between the electrodes. This allows the Nano-electromechanical switch (NEMS) memory to be implemented using a simple bi-layer design and easily integrated with CMOS platforms. We propose an array structure where each memory cell consists of a NEMS memory device and one NMOS transistor for full random-access operation.

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“…In consideration of the precise displacement of the microbeam, molybdenum is chosen as the structural material from the class of refractory metals [17]. From the electrostatic driving perspective, Molybdenum is known for its (1) high strength and stiffness, (2) low wear-out over cycles, and (3) excellent oxidization resistance and thermal stability [18]. It can withstand the mechanical forces and stresses associated with electrostatic actuation, reducing the risk of structural failure.…”

Section: Introductionmentioning

confidence: 99%

Electrostatically actuated all metal MEMS Pirani gauge with tunable dynamic range

Garg,

Arya,

Kumar

et al. 2024

J. Micromech. Microeng.

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An electrostatically actuated all-metal MEMS Pirani gauge with a tunable dynamic range is proposed. Contrary to the conventional fixed gap Pirani gauges, an electrostatic mechanism is employed to tune the gaseous conduction gap. Due to the electrostatic force between the heating element and heat sink, this tuning results in shifting the transition pressure to a higher pressure. As a result, the operating range of the Pirani gauge can be tuned depending on the magnitude of the actuation voltage. Theoretical estimation of the transition pressure corresponding to different gaseous conduction gaps is also presented. Depending on the available margin of gap tuning, the electromechanical and electrothermal analyses are carried out in COMSOL Multiphysics. The analytical approach is validated by experimentally characterizing the fabricated device. The experimentally tested device with the proposed actuation mechanism shows an 11.2 dB increase in dynamic range in comparison to the conventional design. In a CMOS-compatible fabrication process flow, the proposed gauge can be used to monitor vacuum from 40 Pa to 5×10^5 Pa with the electrostatic actuation.

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Characterization of a MEMS-Based Embedded Non Volatile Memory Array for Extreme Environments

Cited by 6 publications

References 6 publications

MEMS Sensor Technologies for Human Centred Applications in Healthcare, Physical Activities, Safety and Environmental Sensing: A Review on Research Activities in Italy

MEMS Sensor Technologies for Human Centred Applications in Healthcare, Physical Activities, Safety and Environmental Sensing: A Review on Research Activities in Italy

A Cantilever-Based NEM Nonvolatile Memory Utilizing Electrostatic Actuation and Vibrational Deactuation for High-Temperature Operation

Electrostatically actuated all metal MEMS Pirani gauge with tunable dynamic range

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