Abstract:A dislocation-free silicon single crystal doped with 10 20 cm -3 germanium (Ge) has been grown using the Czochralski (CZ) growth technique. The Ge concentration in the seed-end and tang-end of the crystal was 8×1019 cm -3 and 1.6×10 20 cm -3 , respectively. The effective segregation coefficient of Ge, the distribution of flow pattern defects (FPDs) and the wafer warpage have been characterized. Both the effective segregation coefficient and the equilibrium segregation coefficient of Ge in silicon were evaluate… Show more
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