Characterization and properties of microwave plasma-treated SrTiO3

Shkabko, Andrey; Aguirre, Myriam H.; Marozau, Ivan; Doebeli, Max; Mallepell, M.; Lippert, Thomas; Weidenkaff, Anke

doi:10.1016/j.matchemphys.2008.11.024

Cited by 21 publications

(27 citation statements)

References 35 publications

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“…This intermediate contains nitrogen molecules chemically bonded in a crystal lattice, which basically still retains the perovskite structure but shows a rather low crystallinity [7,20,22]. The presence of nitrogen can be verified for example by Raman spectroscopy or XPS [14].…”

Section: Resultsmentioning

confidence: 99%

“…In addition, lanthanide doping into the A-sublattice can cause coupling of electronic conductivity or electrical polarization and magnetism. The resulting magnetoresistance, magneto capacitance and resistance switching effects are attractive for application in new memory devices and sensors [14][15][16]. Further interest in the area of oxynitrides is due to the discovery of large dielectric constants of BaTaO 2 Based on UV/Vis spectroscopic measurements and density functional theory (DFT) calculations for a number of d 0 -perovskite-type oxides (ABO 3 , B = Zr 4+ , Ti 4+ , Ta 5+ , Nb 5+ ) the electronegativity of the B-site cation increases in the following order: Zr 4+ < Ti 4+ ≈ Ta 5+ < Nb 5+ [21].…”

Section: Introductionmentioning

confidence: 99%

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Synthesis, Crystal Structure and Optical Properties of LaNbON₂

Logvinovich

Ebbinghaus

Reller

et al. 2010

Zeitschrift anorg allge chemie

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Abstract. LaNbON 2 was synthesized by thermal ammonolysis of crystalline LaNbO 4 prepared by a soft chemistry approach. LaNbON 2 crystallizes in a distorted GdFeO 3 -like perovskite structure with space group Pnma and a = 5.5720(2), b = 7.8656(4), c = 5.6066(3) Å and a random anionic arrangement as revealed by neutron diffraction. Elongated displacement ellipsoids found by neutron diffraction and a con-

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Section: Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Synthesis, Crystal Structure and Optical Properties of LaNbON₂

Logvinovich

Ebbinghaus

Reller

et al. 2010

Zeitschrift anorg allge chemie

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“…17, 19, and 24͔͒ and NH 3 is also likely to chemically affect the STO during its integration in MIM capacitors. [25][26][27][28] Regarding Ru precursors, considerable attention has been devoted to new compounds, which have an improved reactivity and volatility. 34 in the case of Pt.…”

Section: Introductionmentioning

confidence: 99%

Atomic layer deposition of Ru from CpRu(CO)2Et using O2 gas and O2 plasma

Leick

Verkuijlen

Lamagna

et al. 2011

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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Document VersionPublisher's PDF, also known as Version of Record (includes final page, issue and volume numbers)Please check the document version of this publication:• A submitted manuscript is the author's version of the article upon submission and before peer-review. There can be important differences between the submitted version and the official published version of record. People interested in the research are advised to contact the author for the final version of the publication, or visit the DOI to the publisher's website.• The final author version and the galley proof are versions of the publication after peer review.• The final published version features the final layout of the paper including the volume, issue and page numbers. Link to publication General rightsCopyright and moral rights for the publications made accessible in the public portal are retained by the authors and/or other copyright owners and it is a condition of accessing publications that users recognise and abide by the legal requirements associated with these rights.• Users may download and print one copy of any publication from the public portal for the purpose of private study or research.• You may not further distribute the material or use it for any profit-making activity or commercial gain • You may freely distribute the URL identifying the publication in the public portal ? Take down policyIf you believe that this document breaches copyright please contact us providing details, and we will remove access to the work immediately and investigate your claim. The metalorganic precursor cyclopentadienylethyl͑dicarbonyl͒ruthenium ͑CpRu͑CO͒ 2 Et͒ was used to develop an atomic layer deposition ͑ALD͒ process for ruthenium. O 2 gas and O 2 plasma were employed as reactants. For both processes, thermal and plasma-assisted ALD, a relatively high growth-per-cycle of ϳ1 Å was obtained. The Ru films were dense and polycrystalline, regardless of the reactant, yielding a resistivity of ϳ16 ⍀ cm. The O 2 plasma not only enhanced the Ru nucleation on the TiN substrates but also led to an increased roughness compared to thermal ALD.

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“…SrTiO 3 is an important ceramic material having wide uses in the catalysis, semiconducting, gas-sensing, nonlinear optical limiting, electroceramic industry, etc., [1][2][3][4][5][6][7][8]. It is widely accepted that the properties and practical performances of SrTiO 3 are strongly related to its morphology, size, crystal defects, surface properties, etc., [1][2][3][4][5][6][7][8], which ultimately depend on the preparation methods and preparation conditions.…”

Section: Introductionmentioning

confidence: 99%

“…It is widely accepted that the properties and practical performances of SrTiO 3 are strongly related to its morphology, size, crystal defects, surface properties, etc., [1][2][3][4][5][6][7][8], which ultimately depend on the preparation methods and preparation conditions. Generally speaking, phase-pure, composition-homogeneous and size-uniform SrTiO 3 nanocrystals can meet the basic requirements for the most of their intended purposes.…”

Section: Introductionmentioning

confidence: 99%