Abstract:The pseudo-spark electron beam ablation (PSA) technique is a comparatively simple and inexpensive method of depositing thin films of oxide materials. The effects of both the breakdown voltage of the discharge and the oxygen pressure on the power density of a pulsed electron beam and on the efficiency of the ?SA process are studied. The PSA technique is applied to the deposition of YEa2Cu307-x thin films on single crystal SrTiOa and MgO substrates.Thin films with zero resistance transition temperature around 87… Show more
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