2012
DOI: 10.1088/0022-3727/46/3/035101
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Characteristics of ZnO : As/GaN heterojunction diodes obtained by PA-MBE

Abstract: We report on the characterization of wide-band-gap heterojunction diodes based on the p-ZnO/n-GaN material system. The layer structure consists of 11 µm GaN on sapphire substrates and As-doped ZnO film of thickness 0.4 µm obtained by plasma-assisted molecular beam epitaxy (PA-MBE). The quality of the heterojunction was examined by x-ray diffraction, atomic force microscopy and scanning electron microscopy. The arsenic concentration in ZnO, measured by secondary ion mass spectroscopy (SIMS), is 5 × 1020 cm−3. T… Show more

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Cited by 20 publications
(9 citation statements)
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“…The detection limit of hydrogen under such measurement conditions provides the level of 10 18 at/cm 3 [76]. Similar parameters are obtained when measuring thin layers grown by molecular beam epitaxy (MBE) method [77] due to the low primary beam current density and thus the correspondingly low sputter rate.…”
Section: Hydrogen Measurement By Simsmentioning
confidence: 53%
“…The detection limit of hydrogen under such measurement conditions provides the level of 10 18 at/cm 3 [76]. Similar parameters are obtained when measuring thin layers grown by molecular beam epitaxy (MBE) method [77] due to the low primary beam current density and thus the correspondingly low sputter rate.…”
Section: Hydrogen Measurement By Simsmentioning
confidence: 53%
“…There is no indication of layer-relaxation because all counts are detected at a Q x values equal to that of the GaN peak and the position of the reciprocal lattice point corresponding to ZnO layer with respect to GaN shows presence of strain in that layer. 11 ZnO nanostructures were grown on these crystalline layers using a hydrothermal technique. 10 Fig.…”
Section: Resultsmentioning
confidence: 99%
“…The value of the donor density in Zn 0.9 Mg 0.1 O equals 10 17 -10 18 cm À3 . 19 Thus, it may be assumed that the depletion region extends on both sides of the p-Si/MgO/n-Zn 0. …”
Section: -2mentioning
confidence: 99%