2019
DOI: 10.12693/aphyspola.136.916
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The Role of Atmospheric Elements in the Wide Band-Gap Semiconductors

Abstract: The paper addresses the role of ambient elements (H, C, N and O) in the wide-bandgap semiconductor compounds. Their prevalence in the atmosphere imposes limitations not only on the purity of the materials under processing but, also, on the detection and measurement of the content of these species. Specifically, a review of electrical and optical properties, based on the available literature, is presented for: hydrogen in GaN, ZnO and SiC, carbon in GaN and ZnO, nitrogen in ZnO and SiC and oxygen in GaN and SiC… Show more

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Cited by 7 publications
(4 citation statements)
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References 254 publications
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“…SIMS measurement was conducted using a cesium (Cs+) primary beam, and secondary ions as MeCs+ clusters were analyzed. The method of measuring nitrogen as NCs+ and oxygen as OCs+ clusters has been described elsewhere [43].…”
Section: Methodsmentioning
confidence: 99%
“…SIMS measurement was conducted using a cesium (Cs+) primary beam, and secondary ions as MeCs+ clusters were analyzed. The method of measuring nitrogen as NCs+ and oxygen as OCs+ clusters has been described elsewhere [43].…”
Section: Methodsmentioning
confidence: 99%
“…SIMS measurement was conducted using a cesium (Cs + ) primary beam and secondary ions as measured, and secondary ions as MeCs + clusters were analyzed. The method of measuring nitrogen as NCs + and oxygen as OCs + clusters has been described elsewhere [25].…”
Section: Methodsmentioning
confidence: 99%
“…SIMS measurement was conducted using a cesium (Cs + ) primary beam and secondary ions as measured, as MeCs + clusters were analyzed. The method of measuring oxygen as OCs + clusters has been described elsewhere [ 25 ]. The chemical and phase composition of the surface of the titanium nitride layer subjected to hydrothermal treatment was examined using X-ray photoelectron spectrometry (XPS) with a Microlab 350 apparatus (Thermo Electron–VG Scientific, East Grinstead, UK).…”
Section: Methodsmentioning
confidence: 99%