2018
DOI: 10.1007/s11814-018-0179-5
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Characteristics of NiO films prepared by atomic layer deposition using bis(ethylcyclopentadienyl)-Ni and O2 plasma

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Cited by 10 publications
(8 citation statements)
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“…Even after 200 ALD NiO cycles, the electrode still maintained basic nanowire-like nanostructures due to the conformal deposition in the ALD technique, as well as maintained its macroscopic nature without blocking the macropores, as shown in Fig. 2 c, d [ 28 30 ]. TEM analysis for the NiO/CuO/Cu electrode is presented in Fig.…”
Section: Resultsmentioning
confidence: 99%
“…Even after 200 ALD NiO cycles, the electrode still maintained basic nanowire-like nanostructures due to the conformal deposition in the ALD technique, as well as maintained its macroscopic nature without blocking the macropores, as shown in Fig. 2 c, d [ 28 30 ]. TEM analysis for the NiO/CuO/Cu electrode is presented in Fig.…”
Section: Resultsmentioning
confidence: 99%
“…However, nickel deficiency (with Ni/O ratio on the order of 0.7‐0.9) in the films grown using cyclopentadienyl complexes has been also reported at lower deposition temperatures 39,73 . Interestingly, later also Ni‐rich films have been proposed by using cyclopentadienyl and ethylcyclopentadienyl nickel and oxygen plasma 28,74 . Ji et al presented XPS results of films grown with Ni(EtCp) 2 at temperatures of 100°C to 325°C with Ni/O ratio of 1.1 to 1.14 74 .…”
Section: Chemical Deposition Of Nickel Oxide Thin Filmsmentioning
confidence: 97%
“…39,73 Interestingly, later also Ni-rich films have been proposed by using cyclopentadienyl and ethylcyclopentadienyl nickel and oxygen plasma. 28,74 Ji et al presented XPS results of films grown with Ni(EtCp) 2 at temperatures of 100 C to 325 C with Ni/O ratio of 1.1 to 1.14. 74 Koshtyal et al measured similar results for their plasma process with NiCp 2 with, Ni/O ratio of 1.15.…”
Section: Ald Of Nickel Oxidementioning
confidence: 99%
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“…, with oxygen plasmas respectively. 9,[20][21][22] These studies have demonstrated that conformal growth of NiO is possible with cyclopentadienyl based nickel precursors and O 2 plasma. Given the low cost of nickelocene (Ni(Cp) 2 ), it should be an attractive precursor for ALD.…”
Section: Introductionmentioning
confidence: 98%