2021
DOI: 10.1039/d0ma00666a
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Atomic scale surface modification of TiO2 3D nano-arrays: plasma enhanced atomic layer deposition of NiO for photocatalysis

Abstract: Here we report the development of a new scalable and transferable plasma assisted atomic layer deposition (PEALD) process for the production of uniform, conformal and pin hole free, NiO with...

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Cited by 5 publications
(5 citation statements)
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References 37 publications
(46 reference statements)
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“…A good deposition method to achieve this is atomic layer deposition (ALD), a high aspect ratio technique that does not lose the surface area of the original substrate and has been previously proven as a successful method for creating TiO 2 –NiO heterojunctions on similar TiO 2 nanocrystalline structures. 13…”
Section: Resultsmentioning
confidence: 99%
See 2 more Smart Citations
“…A good deposition method to achieve this is atomic layer deposition (ALD), a high aspect ratio technique that does not lose the surface area of the original substrate and has been previously proven as a successful method for creating TiO 2 –NiO heterojunctions on similar TiO 2 nanocrystalline structures. 13…”
Section: Resultsmentioning
confidence: 99%
“…A good deposition method to achieve this is atomic layer deposition (ALD), a high aspect ratio technique that does not lose the surface area of the original substrate and has been previously proven as a successful method for creating TiO 2 -NiO heterojunctions on similar TiO 2 nanocrystalline structures. 13 In order to explore the robustness of TiO 2 nanocrystal coated titanium microwire electrodes, a long-time photo-chronoamperometric experiment was performed. Fig.…”
Section: Photoelectrochemical Characterisation Of Tio 2 Nanorodsmentioning
confidence: 99%
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“…30). 327 Barecca et al used ALD to coat TiO 2 onto a chemical vapour deposited Fe 2 O 3 film, forming an intimately contacted TiO 2stabilised heterojunction with a 10-fold photocurrent increase due to the enhanced charge separation and transfer. 328,329 ALD can also be used to deposit hybrid materials using either singlesource or dual-source precursors.…”
Section: Heterojunction Formationmentioning
confidence: 99%
“…ALD, as an enabling technique, is not limited to only PSCs but can also be applied to other optoelectronic devices. [48][49][50][51]…”
mentioning
confidence: 99%