Characteristics of nano-electrostatic actuator fabricated by FIB-CVD

Kometani, Reo; Morita, T.; Watanabe, Keiichiro; Hoshino, Takayuki; Kondo, Kazushige; Kanda, Kazuhiro; Haruyama, Yuichi; Kaito, Takashi; Fujita, Jun–ichi; Ishida, Masahiko; Ochiai, Yukinori; Matsui, Shinji

doi:10.1109/imnc.2003.1268757

Cited by 2 publications

(3 citation statements)

References 2 publications

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“…Subsequently, focused ion beam methods have also been used for the micromachining [12] of various non-electronic objects, e.g. microgears [13] and electrospray ionization tips based on capillary tubes [14]. Focused ion beam methods are also gaining interest in microsystem fabrication [15].…”

Section: Focused Ion Beam Etchingmentioning

confidence: 99%

A nanofluidic emitter tip obtained by focused ion beam nanofabrication

Arscott¹,

Tománek²

2005

Nanotechnology

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We report here the design, fabrication and testing of a novel nanofluidic device which we term a 'nano-nib' due to its resemblance to a nano-fountain pen. The nanofluidic device is an emitter tip which incorporates a nanofluidic capillary slot coupled to a microfluidic capillary slot. The microfluidic capillary slot is fabricated using reactive ion etching (RIE) whilst the nanofluidic capillary slot is fabricated using focused ion beam (FIB) etching. The microfluidic capillary slot has a length of 2 mm and capillary slot dimensions (w x h) of 1 microm x 4 microm, i.e. a volume of a few picolitres (pl). The smallest nanofluidic capillary slot has a length of 3 microm and capillary slot dimensions as small as 21 nm x 300 nm, i.e. a volume of a few attolitres (al). Current-voltage characterization in electrospray mode revealed a current of 1 nA at an applied voltage as low as 40 V. The applications for this nanofluidic device lie in high sensitivity electrospray mass spectrometry, direct nanowriting, ultralow volume sample extraction/spotting and printing.

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Section: Focused Ion Beam Etchingmentioning

confidence: 99%

A nanofluidic emitter tip obtained by focused ion beam nanofabrication

Arscott¹,

Tománek²

2005

Nanotechnology

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“…These nano-tools include, sensors using FIB-CV is f fas ter and easier compared tooter the electrostaltic nannipulator (which can be conitrolled with a reported thermal probes The FIB-CVD temperatnre senlsors movement rate of about 1 nn/V by using electrostalic wer consru a cfonseque dposion and etingvofr repulsion forces) [3, 4], the bio nano-injector (with freely tnngsten over an atomic force microscope (AFM) cantilever designed tip for vanons functions) [51 anid nano-nets (vhich are which is employed as electrodes. The experimental results used in manipulaling sub cellular organelles) [2]. The demonstrate the great potenlial of FIB-CVD thermal sensors fabrication of sensors using FIB-CVD is quite challenging over for sensing temperature in different environments.…”

mentioning

confidence: 94%

“…In usiiig F C s at aserlcompare toter fabricate novel 3-D nano-tools [2]. These nano-tools include, sensors using FIB-CV is f fas ter and easier compared tooter the electrostaltic nannipulator (which can be conitrolled with a reported thermal probes The FIB-CVD temperatnre senlsors movement rate of about 1 nn/V by using electrostalic wer consru a cfonseque dposion and etingvofr repulsion forces) [3, 4], the bio nano-injector (with freely tnngsten over an atomic force microscope (AFM) cantilever designed tip for vanons functions) [51 anid nano-nets (vhich are which is employed as electrodes.…”

mentioning

confidence: 99%

Three-dimensional Nano Temperature Sensors fabricated using focused ion beam chemical vapour deposition

El-Shimy¹,

Arai²,

Fukuda³

2006 Sixth IEEE Conference on Nanotechnology

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In this work, we illustrate the fabrication of nano feasibility of temperature measurement in local area was temperature sensors using focused ion beam chemical vapor reported. From the construction point of view, attaching two deposition (FIB-CVD) of tungsten over atomic force microscope single CNTs at the tip of an atomic force microscope (AEM) (AFM) cantilever, for sensing temperature distribution in local cantilever and then using electron beaam induced deposition area. The FIB-CVD sensors were calibrated and the temperature (EBID) to fix their lips together using nanorobotic coefficient of resistance shows positive charactenrstics. Building mpulaion techques is witont donbt a h job and lme sensors by this approach is quite faster and easier to fabricate consumin as well. Fermore, it is very difficl to assnre than other reported temperature sensing devices and can be ytt the Ts he m proers. The concept of resistant thermometry may not be applicable if the ldionz bealm; chemnical vapor &eposi.ion; chosen CNTs, attached to the AFM cantilever, are discovered Kineywords-Fsoused nicews: tn; e7"p¢rwjffe to be semi-or non-conductive ones. Aind last but not least, if temperature sensors;n anodevices; tnngjten; temperature two CNT thennal probes were successfilly constrcted, they coefficient ofresistancemay have not exactly the same physical properties. Hence the (INRDCINCNT tlhermal probes cannot be constructed by mass INTROD)UCSTION production. Thus, temperature sensors described in [1], [6] and Focused ion beam chemi:cal vapor deposition (FIB-CVD) [7] are not feasible, either dne to their configuralions, has proven its great potential in the fabricalion of three applicable environments or their difficulty in constrcion. dimensional (3-D) nano-structnred devices with high precision and accuracy. In recent years, FIB-CVD was used toIn usiiig F C s at aserlcompare toter fabricate novel 3-D nano-tools [2]. These nano-tools include, sensors using FIB-CV is f fas ter and easier compared tooter the electrostaltic nannipulator (which can be conitrolled with a reported thermal probes The FIB-CVD temperatnre senlsors movement rate of about 1 nn/V by using electrostalic wer consru a cfonseque dposion and etingvofr repulsion forces) [3, 4], the bio nano-injector (with freely tnngsten over an atomic force microscope (AFM) cantilever designed tip for vanons functions) [51 anid nano-nets (vhich are which is employed as electrodes. The experimental results used in manipulaling sub cellular organelles) [2]. The demonstrate the great potenlial of FIB-CVD thermal sensors fabrication of sensors using FIB-CVD is quite challenging over for sensing temperature in different environments. And we the proposed studies on using carbon nano tubes (CNT) as assure y in both fabrication and operalion. We also thermal probes. explain how this techiiique can be modified for mass production. Bulk CNTs, as described in [6], were used as a temperature sensor. They were aligned by applying dielectrophoresis witliin II THE TEMPERATURE SENSOR FABRICATION...

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Characteristics of nano-electrostatic actuator fabricated by FIB-CVD

Cited by 2 publications

References 2 publications

A nanofluidic emitter tip obtained by focused ion beam nanofabrication

A nanofluidic emitter tip obtained by focused ion beam nanofabrication

Three-dimensional Nano Temperature Sensors fabricated using focused ion beam chemical vapour deposition

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