2015
DOI: 10.1109/jeds.2015.2441736
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Characteristics of Gate-All-Around Junctionless Polysilicon Nanowire Transistors With Twin 20-nm Gates

Abstract: A high performance gate-all-around (GAA) junctionless (JL) polycrystalline silicon nanowire (poly-Si NW) transistor with channel width of 12 nm, channel thickness of 45 nm, and gate length of 20 nm has been successfully demonstrated, based on a simplified double sidewall spacer process. Without suffering serious short-channel effects, the GAA JL poly-Si NW device exhibits excellent electrical characteristics, including a subthreshold swing of 105 mV/dec, a drain-induced barrier lowering of 83 mV/V, and a high … Show more

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Cited by 26 publications
(8 citation statements)
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“…The twin gate structure can also be applied to a double channel GAAFET, as shown in Figure 7b. A fabricated twin gate double channel GAAFET showed an I on /I o f f ratio of 7 × 10 8 , a DIBL of 83 mV/V, and a SS of 105 mV/dec [33]. Besides silicon and polysilicon channel junctionless GAAFETs, devices composed of other materials were also reported: a gallium arsenide junctionless GAAFET was simulated, leading a SS value near to the theoretical limit (58.2 mV/dec at 293.15 K) [27].…”
Section: Gate-all-aroundmentioning
confidence: 99%
See 1 more Smart Citation
“…The twin gate structure can also be applied to a double channel GAAFET, as shown in Figure 7b. A fabricated twin gate double channel GAAFET showed an I on /I o f f ratio of 7 × 10 8 , a DIBL of 83 mV/V, and a SS of 105 mV/dec [33]. Besides silicon and polysilicon channel junctionless GAAFETs, devices composed of other materials were also reported: a gallium arsenide junctionless GAAFET was simulated, leading a SS value near to the theoretical limit (58.2 mV/dec at 293.15 K) [27].…”
Section: Gate-all-aroundmentioning
confidence: 99%
“…This device turned out to be the first one of a new generation of transistors. In the last decades, many other junctionless devices were proposed, which includes FinFET , Gate-All-Around (GAA) [24][25][26][27][28][29][30][31][32][33][34][35][36][37], Single Gate (SGJLT) [38][39][40][41][42][43][44][45][46][47][48][49][50], Double Gate (DGJLT) , Thin Film (TFT) [76][77][78][79][80][81][82][83][84][85][86], and Tunnel FET (TFET) [87][88][89][90][91][92][93][94][95][96][97]. Because most of the review papers on JLTs were published in 2010-2014…”
Section: Introductionmentioning
confidence: 99%
“…Recently, the JLMOSFETs have received significant attention for their technological feasibility and theoretical modeling. In the last decades, several device architectures for JLMOSFETs were proposed, such as Thin Film JLMOSFET [5], [6], FinFET [7], [8], Tunnel FET [9], [10], gate-all-around (GAA) FET [11], [12], singlegate JLT (SG-JLT) [13], [14], double-gate JLMOSFETs (DG-JLMOSFETs) [15]- [18], etc. The DG-JLMOSFETs are becoming more promising due to their superior performances in high speed and low power applications [19].…”
Section: Introductionmentioning
confidence: 99%
“…Gola et al [14] investigated the effect of substrate bias voltage and induced surface potential on the threshold-voltage of Tri-gate junctionless FETs (TG-JLFETs). In specific, gate-all-around junctionless FETs (GAA-JLFETs) have been reported as promising structures for highperformance devices that considered their gate voltage controllability, exciting scalability, and improved carrier transport mechanism [15][16]. Trivedi et al [17] The analytical modeling results have been verified through the TCAD simulation results, where they found excellent agreement between mathematical and simulation results.…”
mentioning
confidence: 99%