Recent advances in semiconductor technology provide us with the resources to explore alternative methods for fabricating transistors with the goal of further reducing their sizes to increase transistor density and enhance performance. Conventional transistors use semiconductor junctions; they are formed by doping atoms on the silicon substrate that makes p-type and n-type regions. Decreasing the size of such transistors means that the junctions will get closer, which becomes very challenging when the size is reduced to the lower end of the nanometer scale due to the requirement of extremely high gradients in doping concentration. One of the most promising solutions to overcome this issue is realizing junctionless transistors. The first junctionless device was fabricated in 2010 and, since then, many other transistors of this kind (such as FinFET, Gate-All-Around, Thin Film) have been proposed and investigated. All of these semiconductor devices are characterized by junctionless structures, but they differ from each other when considering the influence of technological parameters on their performance. The aim of this review paper is to provide a simple but complete analysis of junctionless transistors, which have been proposed in the last decade. In this work, junctionless transistors are classified based on their geometrical structures, analytical model, and electrical characteristics. Finally, we used figure of merits, such as I o n / I o f f , D I B L , and S S , to highlight the advantages and disadvantages of each junctionless transistor category.
Carbon nanotubes (CNTs) can be grown locally on custom-designed CMOS microstructures to use them as a sensing material for manufacturing low-cost gas sensors, where CMOS readout circuits are directly integrated. Such a local CNT synthesis process using thermal chemical vapor deposition (CVD) requires temperatures near 900 °C, which is destructive for CMOS circuits. Therefore, it is necessary to ensure a high thermal gradient around the CNT growth structures to maintain CMOS-compatible temperature (below 300 °C) on the bulk part of the chip, where readout circuits are placed. This paper presents several promising designs of CNT growth microstructures and their thermomechanical analyses (by ANSYS Multiphysics software) to check the feasibility of local CNT synthesis in CMOS. Standard CMOS processes have several conductive interconnecting metal and polysilicon layers, both being suitable to serve as microheaters for local resistive heating to achieve the CNT growth temperature. Most of these microheaters need to be partially or fully suspended to produce the required thermal isolation for CMOS compatibility. Necessary CMOS post-processing steps to realize CNT growth structures are discussed. Layout designs of the microstructures, along with some of the microstructures fabricated in a standard AMS 350 nm CMOS process, are also presented in this paper.
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