Abstract:InGaN micro-light emitting diodes on Si substrates have been fabricated and characterized. Their abilities for micro-display, high modulation bandwidth of 270 MHz and data transmission rate of up to 400 Mbit/s have been demonstrated
“…In 2004, M. D. Dawson et al reported the fabrication process and performance of a 64 × 64 array of ultraviolet (UV) micro-LEDs with a diameter of about 20 μm 21 . K. M. Lau and Z. J. Liu et al reported on UV and red, green, and blue (RGB) micro-LEDs with a diameter of 50 μm and 360 pixels per inch (PPI) resolution in 2013 22 , and then on blue micro-LEDs with 1700 and 2500 PPI resolution displays 23,24 . In 2014, P. F. Tian et al fabricated 10 × 10 micro-LED arrays with pixel diameters of 45 μm and peak emission at ~470 nm 25 .…”
Micro-light-emitting diodes (micro-LEDs) with outstanding performance are promising candidates for next-generation displays. To achieve the application of high-resolution displays such as meta-displays, virtual reality, and wearable electronics, the size of LEDs must be reduced to the micro-scale. Thus, traditional technology cannot meet the demand during the processing of micro-LEDs. Recently, lasers with short-duration pulses have attracted attention because of their unique advantages during micro-LED processing such as noncontact processing, adjustable energy and speed of the laser beam, no cutting force acting on the devices, high efficiency, and low cost. Herein, we review the techniques and principles of laser-based technologies for micro-LED displays, including chip dicing, geometry shaping, annealing, laserassisted bonding, laser lift-off, defect detection, laser repair, mass transfer, and optimization of quantum dot color conversion films. Moreover, the future prospects and challenges of laser-based techniques for micro-LED displays are discussed.
“…In 2004, M. D. Dawson et al reported the fabrication process and performance of a 64 × 64 array of ultraviolet (UV) micro-LEDs with a diameter of about 20 μm 21 . K. M. Lau and Z. J. Liu et al reported on UV and red, green, and blue (RGB) micro-LEDs with a diameter of 50 μm and 360 pixels per inch (PPI) resolution in 2013 22 , and then on blue micro-LEDs with 1700 and 2500 PPI resolution displays 23,24 . In 2014, P. F. Tian et al fabricated 10 × 10 micro-LED arrays with pixel diameters of 45 μm and peak emission at ~470 nm 25 .…”
Micro-light-emitting diodes (micro-LEDs) with outstanding performance are promising candidates for next-generation displays. To achieve the application of high-resolution displays such as meta-displays, virtual reality, and wearable electronics, the size of LEDs must be reduced to the micro-scale. Thus, traditional technology cannot meet the demand during the processing of micro-LEDs. Recently, lasers with short-duration pulses have attracted attention because of their unique advantages during micro-LED processing such as noncontact processing, adjustable energy and speed of the laser beam, no cutting force acting on the devices, high efficiency, and low cost. Herein, we review the techniques and principles of laser-based technologies for micro-LED displays, including chip dicing, geometry shaping, annealing, laserassisted bonding, laser lift-off, defect detection, laser repair, mass transfer, and optimization of quantum dot color conversion films. Moreover, the future prospects and challenges of laser-based techniques for micro-LED displays are discussed.
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