Characterisation of DC Reactive Magnetron Sputtered ZnO Films Prepared at Different Oxygen Pressures

Abstract

Transparent conductive ZnO films have been prepared at different oxygen pressures in the range 1 × 10—4 to 6 × 10—3 mbar on glass substrates held at a fixed temperature of 663 K by reactively sputtering metallic zinc target in a dc magnetron sputtering system. The deposited films were characterised (at 303 K) to study the influence of oxygen pressure on their structure, electrical and optical properties. Films with a low electrical resistivity of 6.9 × 10—2 Ωcm, high optical transmittance of 83% and an optical band gap of 3.28 eV have been obtained at an oxygen pressure of 1 × 10—3 mbar.

Texture development of non-epitaxial polycrystalline ZnO films

“…There are also many reports that higher T s improves c-axis PO [17,[24][25][26]. On the other hand, Hada et al [5] reported that higher T s causes a-axis PO, which is probably due to Al impurities.…”

“…Random-c-axis-random [6] c-axis-a-axis [12] T s a-axis-c-axis [9,12] Random-c-axis [17,[24][25][26] c-axis-a-axis [5] The arrow means the tendency of PO change when the corresponding process condition is increased. V b is negative bias voltage, D is the distance between the target and the substrate, J i /J M is the ion/metal flux ratio, P is the total pressure, P O 2 is the partial pressure of oxygen, O 2 /Ar is the gas composition during deposition, and T s is substrate temperature.…”

Colloidal templating for producing hollow ZnO shells: Fabrication, growth and electrical properties

“…The surface morphologies of thin-films are affected by many factors such as surface diffusion, substrate orientation, preferential adsorption, and many more. The surface morphologies and related mechanisms of ZnO thin-films have been subjects of scientific investigations [14][15][16][17][18][19][20][21]. Many of them report on the formation of preferred orientation of ZnO films.…”

Nanobeads of zinc oxide with rhodamine B dye as a sensitizer for dye sensitized solar cell application

“…Jiang [12] and 0.83% [13] efficiencies using ruthenium metal free mercurochrome dye as a sensitizer. Over the past few years, many methods such as spray pyrolysis, electrodeposition, magnetron sputtering, chemical vapor deposition, pulsed laser deposition, sol-gel and hydrothermal [14][15][16][17][18][19][20] etc. have been developed to synthesize nanostructured ZnO thin films.…”