Spectra and diffraction patterns of multilayer systems based on thin film phosphors Zn2SiO4:Mn, Zn2SiO4:Ti, ZnGa2O4:Cr, ZnGa2O4:Mn, Y2SiO5:Ce, and Y2O3:Eu are presented. Multilayer RGB phosphor triads for obtaining white color were investigate, and developed. Luminescence dependence on electron beam energy, current density, as well as long‐term stability of thin film oxide phosphors were investigated. The novel time behavior characteristic for degradation processes in thin films was found.