1999
DOI: 10.1007/s003390050897
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Cathodoluminescence from nanocrystalline silicon films and porous silicon

Abstract: Luminescence emission of nanocrystalline silicon films has been studied by cathodoluminescence (CL) in the scanning electron microscope. As-deposited films show a dominant band at 400 nm as well as a band centered at about 650 nm. CL spectra of porous silicon samples also show emission at 400 nm. Spectral changes induced by annealing and implantation treatments of the films suggest that the presence of nanocrystals is the origin of the observed CL.

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Cited by 18 publications
(14 citation statements)
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References 12 publications
(21 reference statements)
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“…Blue-green CL bands in oxidized PS have been attributed in some cases, e.g., Refs. 3 and 7, to the presence of oxides while other authors 8,9 did not observe a relation between blue CL and the oxide layer. Since some of the CL observations, including the lack of stability of the luminescence emission under electron irradiation, seem to be related to surface reactions, the use of clean surfaces of PS could enable the study of crystallite-related CL emission.…”
mentioning
confidence: 77%
“…Blue-green CL bands in oxidized PS have been attributed in some cases, e.g., Refs. 3 and 7, to the presence of oxides while other authors 8,9 did not observe a relation between blue CL and the oxide layer. Since some of the CL observations, including the lack of stability of the luminescence emission under electron irradiation, seem to be related to surface reactions, the use of clean surfaces of PS could enable the study of crystallite-related CL emission.…”
mentioning
confidence: 77%
“…The best fit for the latter compound corresponds to Er 5 Si 3 . Previous SEM-CL microscopy observations of these samples revealed that most of the precipitates present an intense luminescence band in the violet-blue range peaked at about 360-370 nm [9] while CL emission of the unimplanted amorphous layers presented a weak blue emission attributed to nanocrystals embedded in the amorphous matrix [10,11].…”
Section: Resultsmentioning
confidence: 99%
“…The presence of the blue band under the conditions of inert atmosphere annealing indicates that the luminescent emission at short wavelengths is not necessarily related to the presence of an oxide phase. Previous comparative CL studies of PS and nanocrystalline Si films have shown the presence of a component of the blue emission in the PS that is not related to oxide layers [10].…”
Section: Resultsmentioning
confidence: 99%