1994
DOI: 10.1002/rcm.1290080213
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Cathodic bombardment and sputtering in the 0.5–4.0 torr pressure region of a glow‐discharge ion source

Abstract: Cathodic ion sputtering energies have been studied in a glow-discharge ion source, operated in the ranges 0.5-2.0 Torr pressure and 100-1000 V discharge voltage using ion kinetic energy spectroscopy. Average energies in the range 10-20 eV were measured. These energies are very low compared with the theoretical prediction of the charge-transfer model. In view of this, the high sputtering yields measured are surprising. It is inferred that the sputtering is caused, not by the discharge gas ions as is still widel… Show more

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