Over the past twenty years or so, glow discharge mass spectrometry (GDMS) has become the industry standard for the analysis of trace elements in metals and semiconductors. A review of its history is followed by a picture of the present situation and a look to where the future may lie. Applications are summarised, including the ability of GDMS to offer depth-resolved data and non-conductor analysis, and the well-documented quantitative nature of the results is reviewed. The effects resulting from the physical properties of the analyte material are discussed at length. Finally, recent work such as "fast flow" sources and pulsed glow discharges is reviewed.

between the accepted reference values and the GDMS results 207, 445. was found.

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Measurements of the absolute intensities of discharge gas and trace elements/isotopes can help to understand the ionization mechanism and contribute to the reduction in uncertainty related to the relative sensitivity factor (RSF).