A spreading-resistance temperature (SRT) sensor is fabricated on silicon-on-insulator (SOI) substrate and achieves promising characteristics as compared with similar SRT sensor on bulk silicon wafer. Moreover, experimental results show that the maximum operating temperature of thin-film (1.2 m) SOI SRT sensor can reach 450 C, much higher than 350 C of thickfilm (10 m) SOI SRT sensor under the same current level. With complete oxide isolation, this sensor structure can be potentially used in low-power integrated sensors operating at temperatures as high as 450 C.