Carbon coatings with high concentrations of silicon deposited by RF PECVD method at relatively high self-bias

Jędrzejczak, Anna; Batory, D.; Dominik, Magdalena; Śmietana, Mateusz; Cichomski, M.; Szymański, W.; Bystrzycka, E.; Prowizor, Milena; Kozlowski, W.; Dudek, Mariusz

doi:10.1016/j.surfcoat.2017.09.044

Cited by 7 publications

(11 citation statements)

References 31 publications

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“…Refractive index values 2.2-2.5 were found. Values of the refractive index of DLC:Si films similar to the present study were reported by Kato et al [10] and Jedrzejczak et al [11]. It was 2.1-2.2 [10] and 2.15-2.3 [11].…”

Section: Optical Propertiessupporting

confidence: 91%

“…Values of the refractive index of DLC:Si films similar to the present study were reported by Kato et al [10] and Jedrzejczak et al [11]. It was 2.1-2.2 [10] and 2.15-2.3 [11]. According to Kato et al [10] and Jedrzejczak et al [11], silicon doping can slightly increase the refractive index of DLC films.…”

Section: Optical Propertiessupporting

confidence: 90%

“…It should be mentioned that other authors reported similar results. Much the same changes of the optical properties as a result of silicon doping were reported by Jedrzejczak et al [11]. Si doping increased transparency of hydrogenated DLC films in numerous studies [10,40,41].…”

Section: Optical Propertiessupporting

confidence: 74%

“…Si doping increased transparency of hydrogenated DLC films in numerous studies [10,40,41]. However, DLC:Si films contained up to 11 at.% O [11] and 13-22 at.% of oxygen [40]. Thus, in those cases, the possible influence of SiO x should be taken into account, too.…”

Section: Optical Propertiesmentioning

confidence: 99%

“…Properties of DLC films can be additionally controlled by introducing chemical elements other than carbon or hydrogen [1,[3][4][5][6][7][8]. Particularly, silicon is one of the most often used DLC dopants [6][7][8][9][10][11][12][13][14][15][16][17][18][19][20][21][22][23]. Reduced internal stress and friction coefficient, as well as increased thermal resistance, while keeping high hardness of Si doped diamond-like carbon films were reported [9].…”

Section: Introductionmentioning

confidence: 99%

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Diamond Like Carbon Films Containing Si: Structure and Nonlinear Optical Properties

et al. 2020

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In the present research diamond-like carbon (DLC) films containing 4–29 at.% of silicon were deposited by reactive magnetron sputtering of carbon target. Study by X-ray photoelectron spectroscopy revealed the presence of Si–C bonds in the films. Nevertheless, a significant amount of Si–O–C and Si–Ox bonds was present too. The shape of the Raman scattering spectra of all studied diamond-like carbon containing silicon (DLC:Si) films was typical for diamond-like carbon. However, some peculiarities related to silicon doping were found. Studies on the dependence of DLC:Si of the optical transmittance spectra on the Si atomic concentration have shown that doping by silicon affects linear, as well as nonlinear, optical properties of the films. It is shown that the normalized reflectance of DLC:Si films decreased with the increased exciting light fluence. No clear relation between the normalized reflectance and photoexcited charge carrier relaxation time was found. It was suggested that that the normalized reflectance decrease with fluence can be related to nonlinear optical properties of the hydrogenated diamond-like carbon phase in DLC:Si film.

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