2020
DOI: 10.1016/j.tsf.2019.137697
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Titanium(IV) isopropoxide as a source of titanium and oxygen atoms in carbon based coatings deposited by Radio Frequency Plasma Enhanced Chemical Vapour Deposition method

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Cited by 10 publications
(7 citation statements)
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“…42,52 The band at z826 cm À1 can be attributed to out-of-plane deformation of vibrational modes of the nitrate group, while the band at z691 cm À1 can be assigned to Fe-OH groups in the iron nitrate precursor salt and also T-O-Ti vibrations of the titanium isopropoxide precursor that have been noted at 820 and 700 cm À1 . [51][52][53] The two bands at z648 and 576 cm À1 can be associated with metal-oxygen bonds, Ti-O and Fe-O bonds, respectively. 42,44,47 Calcined nanobers Morphological and structural analysis.…”
Section: Resultsmentioning
confidence: 99%
“…42,52 The band at z826 cm À1 can be attributed to out-of-plane deformation of vibrational modes of the nitrate group, while the band at z691 cm À1 can be assigned to Fe-OH groups in the iron nitrate precursor salt and also T-O-Ti vibrations of the titanium isopropoxide precursor that have been noted at 820 and 700 cm À1 . [51][52][53] The two bands at z648 and 576 cm À1 can be associated with metal-oxygen bonds, Ti-O and Fe-O bonds, respectively. 42,44,47 Calcined nanobers Morphological and structural analysis.…”
Section: Resultsmentioning
confidence: 99%
“…Organosilane self-assembled monolayers were created on Ti-DLC coatings prepared on Si substrates using the radio-frequency plasma-enhanced chemical vapor deposition (RF PECVD) method with the deposition parameters described in detail in previous works [10,11]. The produced Ti-DLC coatings contained about 9.4 at.% of titanium, and the hardness and Young's modulus were, respectively, equal to 5.5 ± 0.3 GPa and 94.1 ± 5.5 GPa.…”
Section: Methodsmentioning
confidence: 99%
“…An interesting modern material that has enjoyed growing interest in the last several years and has been successfully used for technical, medical, and biological applications is titanium-incorporated diamond-like carbon (Ti-DLC) coatings [7][8][9][10][11]. One of the most important characteristics of these coatings is chemical inertness, which allows for their use in biomedical applications.…”
Section: Introductionmentioning
confidence: 99%
“…If there is no chemical reaction, this process is called physical vapor deposition (PVD). Otherwise, it is called chemical vapor deposition (CVD) [41][42][43][44][45].…”
Section: Chemical Vapor Deposition Methodsmentioning
confidence: 99%
“…In a study [43], carbon-based TiOx-DLC coatings were prepared on silicon substrates using a capacitively coupled radiofrequency (RF, 13.56 MHz) of plasma discharge in a vacuum system. The substrates were sonicated in an acetone bath and placed on a watercooled radiofrequency electrode.…”
Section: Chemical Vapor Deposition Methodsmentioning
confidence: 99%