2020
DOI: 10.3390/ma13041003
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Diamond Like Carbon Films Containing Si: Structure and Nonlinear Optical Properties

Abstract: In the present research diamond-like carbon (DLC) films containing 4–29 at.% of silicon were deposited by reactive magnetron sputtering of carbon target. Study by X-ray photoelectron spectroscopy revealed the presence of Si–C bonds in the films. Nevertheless, a significant amount of Si–O–C and Si–Ox bonds was present too. The shape of the Raman scattering spectra of all studied diamond-like carbon containing silicon (DLC:Si) films was typical for diamond-like carbon. However, some peculiarities related to sili… Show more

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Cited by 87 publications
(48 citation statements)
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“… [6a,d] XPS results of C 1s showed main peaks located at 282.5, 284.7, 286.1, 287.8 which were attributed to C−Si, C−C or C=C, C−N, and C−O or C−S bonds, respectively [13] . XPS spectra in Si 2p region showed two peaks centered at 103.8 and 104.5 related to Si‐O−C and SiO 2 , forms, respectively [14] . Peaks located at 398.5, 400 and 4.1.5 are related to N=N, N−C and +NR 3 forms of nitrogen, respectively [6d,15] .…”
Section: Resultsmentioning
confidence: 99%
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“… [6a,d] XPS results of C 1s showed main peaks located at 282.5, 284.7, 286.1, 287.8 which were attributed to C−Si, C−C or C=C, C−N, and C−O or C−S bonds, respectively [13] . XPS spectra in Si 2p region showed two peaks centered at 103.8 and 104.5 related to Si‐O−C and SiO 2 , forms, respectively [14] . Peaks located at 398.5, 400 and 4.1.5 are related to N=N, N−C and +NR 3 forms of nitrogen, respectively [6d,15] .…”
Section: Resultsmentioning
confidence: 99%
“…[13] XPS spectra in Si 2p region showed two peaks centered at 103.8 and 104.5 related to Si-OÀ C and SiO 2 , forms, respectively. [14] Peaks located at 398.5, 400 and 4.1.5 are related to N=N, NÀ C and + NR 3 forms of nitrogen, respectively. [6d,15] The presence of Br in the structure was confirmed by the appearance of peaks at 65.7 and 66.9 related ChemistrySelect to 3d5/2 and 3d3/2, respectively.…”
Section: Chemistryselectmentioning
confidence: 99%
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“…The O1s peaks were attributed to oxygen in C–O–C and Si–O–Si bonds. The proportions of O and C atoms that were bound to Si atoms could be determined by comparing the binding energies in the Si2p spectra of SiO 2 C 2 and SiO 2 or SiO 3 C [ 20 , 21 ]. Carbon in C–H bonds accounted for more than half of the peak intensity in the de-convoluted C1s spectra.…”
Section: Resultsmentioning
confidence: 99%
“…Recently published work revealed DLC films that contain 4-29% of Si and were deposited by reactive magnetron sputtering of C target [145]. H-free DLC films with embedded Cu nanoparticles, such as DLC: Cu, were increased by simultaneous DC magnetron sputtering with graphite and Cu points of view [146].…”
Section: Recent Manufacturing Processmentioning
confidence: 99%