Capacitive stabilization of an electrostatic actuator: output feedback viewpoint

Maithripala, D. H. S.; Berg, Jordan M.; Dayawansa, W.P.

doi:10.1109/acc.2003.1240470

Cited by 31 publications

(26 citation statements)

References 15 publications

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“…Capacitance estimation of electrostatic actuators is the first step in developing complex control systems which includes some kind of feedback loop of the capacitance or distance between the plates of the actuator [1][2][3][4]. Usually, those systems rely on complex optical measurements [5] or anchored capacitive sensors to obtain its value [6]; however, the distance between the plates can be estimated by processing only the driving signal applied to the actuator by means of making use of the parallel-plate capacitor approximation, which states that the actuator capacitance C(t) and distance between the plates g(t) are related by C(t) = e 0 A/g(t).…”

Section: Introductionmentioning

confidence: 99%

Pulse drive and capacitance measurement circuit for MEMS electrostatic actuators

Fernandez

Madrenas

Domínguez

et al. 2008

Analog Integr Circ Sig Process

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In this paper we present an electronic circuit for position or capacitance estimation of MEMS electrostatic actuators based on a switched capacitor technique. The circuit uses a capacitive divider configuration composed by a fixed capacitor and the variable capacitance of the electrostatic actuator for generating an output signal that is a function of the input voltage and capacitive ratio. The proposed circuit can be used to simultaneously actuate and sense position of an electrostatic MEMS actuator without extra sensing elements. This approach is compatible with the requirements of most analog feedback systems and the circuit topology of pulsed digital oscillators.

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Section: Introductionmentioning

confidence: 99%

Pulse drive and capacitance measurement circuit for MEMS electrostatic actuators

Fernandez

Madrenas

Domínguez

et al. 2008

Analog Integr Circ Sig Process

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“…Hence, much research has been conducted to drive Another challenge for most electrostatic actuators is the pull-in phenomenon or the saddle-node bifurcation that limits their operation range. Thus, much research has been dedicated to extending an operation range of an electrostatic actuator beyond the pull-in point by the use of charge control [7,8], voltage control with a feedback capacitor in series with an electrostatic actuator [9,10], and implementation of a closed-loop control [11][12][13]. For instance, K.O.…”

Section: Overviewmentioning

confidence: 99%

“…Dutton [9] and D.H.S. Maithripala et al [10] develop the voltage control method with a feedback capacitor in series to extend the operation range of an electrostatic actuator. The schematic of the parallel-plate actuator driven by voltage control with a feedback capacitor in series is presented in Figure 2.10.…”

Section: Voltage Control With a Feedback Capacitormentioning

confidence: 99%

Low Voltage Electrostatic Actuation and Displacement Measurement Through Resonant Drive Circuit

Park

Abdel‐Rahman

2012

Volume 5: 6th International Conference on Micro- And Nanosystems; 17th Design for Manufacturing and the Life Cycle Conference

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Most electrostatic actuators fabricated by MEMS technology require high actuation voltage and suffer from the pull-in phenomenon that limits the operation range. We present an amplitude-modulated resonant drive circuit to drive electrostatic actuators at much lower supply voltage than that of conventional actuators to extend their operation range. Analytical and numerical models facilitate stability analysis of electrostatic actuators coupled with the resonant drive circuit. We study the impact of parasitic capacitance and the quality factor of the resonant drive circuit on the operation range of electrostatic actuators. Furthermore, we present a new method to measure the displacement of electrostatic actuators by sensing the phase delay of the actuation voltage with respect to the input voltage. This measurement method allows us to easily incorporate feedback control into existing electrostatic actuators without any modification to the actuator itself.

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“…Thus, the perfect tracking is achievable if parameters are certain. In the (6), if the a 1 and a 2 are assumed uncertain , then the input of feedback nonlinear control is described as (9) Noting that (3), (5), and (9), we can get A first order filter is designed as (12) Using the (12), the (10) is modified below form (13) Furthermore, the adaptation law is designed as:…”

Section: Adaptice Control Designmentioning

confidence: 99%

“…Therefore, in recent years, different nonlinear controls have been extended to the control of electrostatic microactuator. The some feedback control techniques were developed which those conclude input-output linearization, feedback, and charge feedback schemes [4][5][6][7]. Control schemes based on differential flatness, Lyapunov functions and backstepping control were reported by [11][12][13], respectively.…”

Section: Introductionmentioning

confidence: 99%

Adaptive Control of an Electrostatic Micro-Actuator with Unbounded Dynamic Uncertainties based on Lyapunov Stability Criterion

Nadafi¹

2014

IJCA

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In this paper, a model reference adaptive control is designed for perfect tracking of moveable electrode of an electrostatic microactuator. The adaptive control of the nonlinear model of this microactuator is constituted feedback control and adaptation law. A Lyapunov function is presented that it guarantees perfect tracking and parameter convergences. The simulation shows designed adaptive control to have robustness appropriately against limited parameter varieties. Furthermore, input control is far from saturation condition.

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Capacitive stabilization of an electrostatic actuator: output feedback viewpoint

Cited by 31 publications

References 15 publications

Pulse drive and capacitance measurement circuit for MEMS electrostatic actuators

Pulse drive and capacitance measurement circuit for MEMS electrostatic actuators

Low Voltage Electrostatic Actuation and Displacement Measurement Through Resonant Drive Circuit

Adaptive Control of an Electrostatic Micro-Actuator with Unbounded Dynamic Uncertainties based on Lyapunov Stability Criterion

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