Capacitance–voltage analysis of LaAlO3/SrTiO3 heterostructures

Abstract

We performed capacitance–voltage analysis of 5-nm-thick LaAlO3/SrTiO3 heterostructure containing two-dimensional-electron-gas (2DEG) at the interface. The complex impedance of the heterostructure was measured as a function of frequency for a wide range of gate biases. The impedance spectra showed a different behavior above and below an applied voltage of −1.8 V. The capacitance determined from the impedance was approximately 1.2 nF above −1.8 V and was drastically reduced to ∼0.01 nF below this voltage, owing to depletion of 2DEG and the insulating SrTiO3 underneath it. This suggests that devices utilizing LaAlO3/SrTiO3 can facilitate switching operations in a very small voltage range.