“…Comparatively, MIM capacitors are simpler, require less die space, and allow to obtain and as a function of from one-port measurements [5]. Nevertheless, the parasitics inherent to the test fixture have to be properly modeled within the microwave range; otherwise, the extracted data may present unexpected fluctuations and even negative values [2]. In this regard, in [6] different equivalent circuits are investigated to reproduce experimental data corresponding to MIM capacitors, where the increased complexity of the model as frequency increases is pointed out.…”