A new method of dielectric characterization in the microwave range for high-k ferroelectric thin films

Nadaud, Kevin; Gundel, Hartmut; Borderon, Caroline; Gillard, Raphaël; Fourn, Erwan

doi:10.1109/isaf.2013.6748698

Cited by 6 publications

(1 citation statement)

References 9 publications

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“…The best way to measure the properties of thin ferroelectric films is by using planar [ 7 , 8 , 9 , 10 , 11 ] or sandwich [ 11 , 12 , 13 ] capacitors based on them. The properties of the ferroelectric film can be extracted from the overall capacitor parameters.…”

Section: Introductionmentioning

confidence: 99%

An Adaptation of the Split-Cylinder Resonator Method for Measuring the Microwave Properties of Thin Ferroelectric Films in a “Thin Film—Substrate” Structure

Gagarin,

Tsyganova,

Altynnikov

et al. 2024

Sensors

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The split-cylinder resonator method was adapted to measure the microwave properties (dielectric permittivity and loss tangent) of thin ferroelectric films on a dielectric substrate. The mathematical model for calculating the resonance frequency of the split-cylinder resonator was adjusted for the “ferroelectric film—substrate” structure. An approach for correcting the gap effect based on calibrating with a single-layer dielectric was introduced and used to study two-layer dielectrics. The prototype of a split-cylinder resonator designed to measure single-layer dielectric plates at a frequency of 10 GHz was presented. The resonator calibration was performed using dielectric PTFE samples and fused silica, and an example of the correction function was suggested. The measurement error was estimated, and recommendations on the acceptable parameter range for the material under investigation were provided. The method was demonstrated to measure the microwave properties of a ferroelectric film on a fused silica substrate.

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