Calcul exact de la fonction de distribution des ions incidents sur une cible dans le cas d'un plasma de pulvérisation

The contribution of fast neutrals to cathode erosion in glow discharges

“…(1) where a i s in cm2, and the ion energy E is in eV. Chouan and Collobert (1982) use a similar expression for a. (Strictly speaking it is the relative velocity of the colliding ion and atom which enters in the cross-section, but we shall assume that the atom is at rest before the collision.)…”

“…The expression in equation (6a) was derived by Davis and Vanderslice (1963) and also by Chouan and Collobert (1982). Except for the contribution of the primary ions to the energy distribution (the first term in equations ( 4a) and (6a), corresponding to those ions that do not collide in the dark space), and for L/A 3 1, the ion distributions peak at low energies and decrease monotonically with increasing ion energy.…”

“…Erosion rates have been calculated before by Hosokawa (1979) and Chouan and Collobert (1982). For a comment on the energy distributions of neutrals calculated by Hosokawa (1979) see Abril et a1 (1983).…”

“…For a comment on the energy distributions of neutrals calculated by Hosokawa (1979) see Abril et a1 (1983). The calculations of Chouan and Collobert (1982) only take into account the sputtering effect of the ions, for a linear electric field variation.…”