Particles sputtered from solid targets in plasma deposition systems, under typical vacuum conditions, slow down in collisions with the gas phase. A simple model of particle slowing down along straight-line trajectories, subject to a continuous energy loss process, allows to calculate the energy distributions of the nonthermalized component of the particle flux as a function of the distance to the source. Physically reasonable angular and energetic distributions of the flux at emission are used in the calculations. The implications on the deposited films are discussed, and previous estimates by Meyer et al. [J. Appl. Phys. 52, 5803 (1981)] are commented upon.
Particles sputtered from solid targets in plasma deposition systems, under typical vacuum conditions, slow down in collisions with the gas phase. The spatial profiles of particle fluxes at given instantaneous energy are calculated with a simple model of a particle slowing down along straight-line trajectories, subject to a continuous energy-loss process. In particular, the profiles of flux thermalization are given. Model distributions in energy and direction of sputtered fluxes, with a reasonable physical basis, are used. The accumulation and diffusion of thermalized material in the gas phase is studied also, and the stationary spatial profiles are obtained. Diffusion particle currents back to the source, or towards the substrate, can then be estimated. Scaling laws are obtained that allow the analysis of any specific deposition conditions through the masses of the sputtering and sputtered particles, the binding energy of the target, and the working pressure. Because of the simplifying assumptions of the analytical model, predictions in the particular case of light targets sputtered in a comparatively heavier atmosphere should be only regarded on an orientative basis.
Charge-exchange collision in the cathode fall region of an abnormal glow discharge is assumed to be the mechanism which limits the energy of the ions and generates the energetic neutrals bombarding the cathode. The model used by %. D. Davis and T. A. Vanderslice |Phys. Rev. 131, 219 (1963)
Articles you may be interested inSimulation of energy transfer from a glow discharge to a solid surfaceThe characterization of plasma environments requires the evaluation of elastic and inelastic energy loss processes undergone by the species present in the plasma. For instance, the slowing down of sputtered fluxes due to elastic collisions with the background gas determines the distributions of the thermalized and energetic components of deposited fluxes. The inelastic processes undergone by the species in the sheath determine the energy and angular distributions of the sputtering fluxes that reach the cathode in a glow discharge, and also influence the spatial dependence of the electric field in the sheath. We have modeled several processes of interest in glow discharge systems. Estimates of the quantities mentioned above will be commented upon and, whenever possible, compared with other theories and with relevant experimental data.
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