2006
DOI: 10.1016/j.ultras.2006.06.064
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Bulk-wave and guided-wave photoacoustic evaluation of the mechanical properties of aluminum/silicon nitride double-layer thin films

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Cited by 28 publications
(9 citation statements)
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“…This is due to the high sensitivity of this method in a wide spectral range, the smallness of the required amount of the analyte, as well as the possibility of performing a nondestructive analysis of the distribution of the characteristics of the medium in depth [7]. In the work [8], to study the inhomogeneities and defects in the structure of materials, ultrasonic spectroscopy and flaw detection methods are used. The methods are based on an analysis of the frequency dependences of the attenuation coefficient and the phase velocity of acoustic waves in the material under study.…”
Section: Literature Review and Problem Statementmentioning
confidence: 99%
“…This is due to the high sensitivity of this method in a wide spectral range, the smallness of the required amount of the analyte, as well as the possibility of performing a nondestructive analysis of the distribution of the characteristics of the medium in depth [7]. In the work [8], to study the inhomogeneities and defects in the structure of materials, ultrasonic spectroscopy and flaw detection methods are used. The methods are based on an analysis of the frequency dependences of the attenuation coefficient and the phase velocity of acoustic waves in the material under study.…”
Section: Literature Review and Problem Statementmentioning
confidence: 99%
“…4 Acoustic-based methods are of great interest since they provide a non-destructive mean to probe interface quality and adhesion. Techniques using reflection and transmission of bulk acoustic waves at an imperfect interface 3,[5][6][7] or propagation of guided waves in bonded structures [8][9][10][11][12] or in plates with delamination [13][14][15][16] have been developed. Although less used, the application of interface waves suggests interesting potentialities owing to their extreme sensitivity to the boundary conditions at the contacting interface.…”
Section: Scaled Behavior Of Interface Waves At An Imperfect Solid-solmentioning
confidence: 99%
“…Yun [24] evaluated the Young's modulus of a silicon nitride thin film based on microcantilever resonance tests with ultrasonically actuations. When compared with other techniques to investigate micro materials' mechanical behavior, including bending [25], ultrafast laser metrology [26] and bulge tests [27], micocantilever techniques can provide simpler procedures or enhanced detectability. The aforementioned micro beam test methods are enlightening, however their applications are still confined to microscale materials such as thin films.…”
Section: Introductionmentioning
confidence: 99%