Bulk sensing performance comparison between silicon dioxide and resonant high aspect ratio nanopillars arrays fabricated by means of interference lithography

Cornago, Iñaki; Hernández, Ana López; Casquel, Rafael; Holgado, Miguel; Heras, María Fe Laguna; Sanza, Francisco J.; Bravo, J.

doi:10.1364/ome.6.002264

Cited by 15 publications

(14 citation statements)

References 22 publications

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“…The lattice parameter among the pillars forming the array is 500 nm and the pillars diameter is around 200 nm. The fabrication of the R-NPs involves several steps, from thin film layer deposition, laser interference lithography, an intermediate lift-off process and a final etching of the pillars; this fabrication process has been reported in detail elsewhere [17].…”

Section: Methodsmentioning

confidence: 99%

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How the surrounding environment affects the biosensing performance of resonant nanopillars arrays: Under dry conditions or immersed in fluid

Hernández

Casquel

Holgado

et al. 2018

Sensors and Actuators B: Chemical

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In this work we demonstrate the advantage of performing the biosensing process of a refractive index optical biosensor under dry conditions, in comparison with the biosensing structure immersed in fluid. We developed a biosensing experiment over a specific transducer based on resonant nanopillars (R-NPs) arrays. The optical interrogation to monitor the recognition events was firstly performed with the R-NPs in dry, only in contact with the air, and secondly with the R-NPs immersed in water. We observed a significant enhance in the sensitivity of the biosensing curve response for the R-NPs in dry conditions, leading an improvement of the Limit of Detection (LoD) in more than one order of magnitude. These results are also in good correlation with 3D-Finite difference time domain simulations carried out for both fluid conditions. According to this result, any interferometric optical bio-transducer for in-situ diagnosis will improve the sensitivity in case it can operate in dry conditions. Moreover, measuring in simple drops of biological samples, in dry conditions, will be a relevant issue for Point of Care Devices.

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Section: Methodsmentioning

confidence: 99%

“…In previous works we demonstrated the performance of R-NPs made of Si 3 N 4 /SiO 2 [17] and their feasibility to be used as biochem-ical sensors [18,19]. For it, we immersed the pillars in fluids with different refractive index (RI), and we interrogated them vertically from the backside.…”

Section: Introductionmentioning

confidence: 99%

How the surrounding environment affects the biosensing performance of resonant nanopillars arrays: Under dry conditions or immersed in fluid

Hernández

Casquel

Holgado

et al. 2018

Sensors and Actuators B: Chemical

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“…These sensing cells were fabricated from a bulk multilayer stack over transparent substrate, consisting of two Bragg reflectors of Si 3 N 4 /SiO 2 and a central cavity of SiO 2 . The process of fabrication included a lithography step, which could be either laser interference lithography [35] or E-beam lithography [36], obtaining pillars with around 200 nm in diameter, several values of pitch and a height in the order of 2 μm. (Fig.…”

Section: Vertical Sensorsmentioning

confidence: 99%

Engineering vertically interrogated interferometric sensors for optical label-free biosensing

et al. 2020

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In this work, we review the technology of vertically interrogated optical biosensors from the point of view of engineering. Vertical sensors present several advantages in the fabrication processes and in the light coupling systems, compared with other interferometric sensors. Four different interrelated aspects of the design are identified and described: sensing cell design, optical techniques used in the interrogation, fabrication processes, fluidics, and biofunctionalization of the sensing surface. The designer of a vertical sensor should decide carefully which solution to adopt on each aspect to finally integrating all the components in a single platform. Complexity, cost, and reliability of this platform will be determined by the decisions taken on each of the design process. We focus in the research and experience acquired by our group during last years on the field of optical biosensors.

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“…4.2 Nano-limited effect for nanocrystal growth An application that combines superhydrophobicity and antireflection by using of hybrid micro-nanostructures is for high-resolution surface enhanced Raman spectrum (SERS) detection [4]. In addition, laser interference is widely used for template fabrication due to its nanofabrication capacities [20,34,63]. The minimum structure period is approximately half of the laser wavelength on the basis of the equation for laser interference period, which provides a way to realize the patterns of nanofeatures.…”

Section: Structures For Optical Manipulationmentioning

confidence: 99%

“…The laser wavelength is usually determined by photoresist linear absorption. Most laser sources are reported at 355 [15], 325 [11,20], 266 [5], 257 [21], and 193 nm at deep ultraviolet wavelengths [22], which limit the resolution of the structures with a minimum period of l/2n. Thus far, the minimum period of 90 nm has been realized by the immersion method with a 45 nm half-pitch and two views of self-aligned frequency-doubled patterns at 22 nm halfpitch, followed by two potassium hydroxide (KOH) etch pattern-transfer steps [22].…”

Section: Introductionmentioning

confidence: 99%

Laser interference fabrication of large-area functional periodic structure surface

Wang

et al. 2018

Front. Mech. Eng.

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Functional periodic structures have attracted significant interest due to their natural capabilities in regulating surface energy, surface effective refractive index, and diffraction. Several technologies are used for the fabrication of these functional structures. The laser interference technique in particular has received attention because of its simplicity, low cost, and high-efficiency fabrication of large-area, micro/nanometer-scale, and periodically patterned structures in air conditions. Here, we reviewed the work on laser interference fabrication of large-area functional periodic structures for antireflection, self-cleaning, and superhydrophobicity based on our past and current research. For the common cases, four-beam interference and multi-exposure of two-beam interference were emphasized for their setup, structure diversity, and various applications for antireflection, self-cleaning, and superhydrophobicity. The relations between multi-beam interference and multi-exposure of two-beam interference were compared theoretically and experimentally. Nanostructures as a template for growing nanocrystals were also shown to present future possible applications in surface chemical control. Perspectives on future directions and applications for laser interference were presented.

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Bulk sensing performance comparison between silicon dioxide and resonant high aspect ratio nanopillars arrays fabricated by means of interference lithography

Cited by 15 publications

References 22 publications

How the surrounding environment affects the biosensing performance of resonant nanopillars arrays: Under dry conditions or immersed in fluid

How the surrounding environment affects the biosensing performance of resonant nanopillars arrays: Under dry conditions or immersed in fluid

Engineering vertically interrogated interferometric sensors for optical label-free biosensing

Laser interference fabrication of large-area functional periodic structure surface

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