Bulk PZT Cantilever Based MEMS Acoustic Transducer for Cochlear Implant Applications

Koyuncuoğlu, Aziz; İlik, Bedirhan; Chamanian, Salar; Uluşan, Hasan; Ashrafi, Parinaz; Işık, Dilek; Külah, Haluk

doi:10.3390/proceedings1040584

Cited by 15 publications

(11 citation statements)

References 7 publications

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“…8 with micrograph of the chip. A custom MEMs piezoelectric harvester [25], fabricated in METU_MEMS center, is mounted on a holding board. The MEMS harvester with footprint of 9 mm × 4 mm has a capacitor of 4 nF.…”

Section: Resultsmentioning

confidence: 99%

An Adaptable Interface Circuit With Multistage Energy Extraction for Low-Power Piezoelectric Energy Harvesting MEMS

Chamanian

Uluşan

Koyuncuoğlu

et al. 2019

IEEE Trans. Power Electron.

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This paper presents a self-powered interface circuit to extract energy from ambient vibrations for powering up microelectronic devices. The circuit interfaces a piezoelectric energy harvesting micro electro-mechanical systems (MEMS) device to scavenge acoustic energy. Synchronous electric charge extraction (SECE) technique is deployed through the implementation of a novel multistage energy extraction (MSEE) circuit in 180 nm HV CMOS technology to harvest and store energy. The circuit is optimized to operate with minimum power losses when input power is limited, and adapts well to operating conditions with higher input power. The highly accurate peak detector was validated for a wide piezoelectric frequency range from 20 Hz to 4 kHz. A charging efficiency of about 84% has been achieved for 4.75 V open-circuit piezoelectric voltage excited at 390 Hz input vibration under nominal input power range of 30-80 µW. Power optimizations enable the circuit to maintain a conversion efficiency of 47% at input power level as low as 3.12 µW. MSEE provides up to 15% efficiency improvement compared to traditional SECE, and maintains power efficiency as high as possible for a wide input power range. Index Terms-Interface circuit (IC), multistage energy extraction (MSEE), piezoelectric energy harvester (PEH), power efficiency, self powered, vibration.

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Section: Resultsmentioning

confidence: 99%

An Adaptable Interface Circuit With Multistage Energy Extraction for Low-Power Piezoelectric Energy Harvesting MEMS

Chamanian

Uluşan

Koyuncuoğlu

et al. 2019

IEEE Trans. Power Electron.

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“…Lead zirconate titanate (PZT) is the most well-known commercialised inorganic polycrystalline ceramic piezoelectric material that possesses perovskite characteristics. In [ 46 ], a MEMS acoustic energy harvester has been developed to utilise sound as the mechanical energy source in a fully implanted cochlear implant system ( Figure 3 a). This in vivo piezoelectric energy harvester is positioned on the tympanic membrane (eardrum) and transduces the incoming acoustic waves into electrical signals that can power up the hearing system.…”

Section: Energy Harvester For Totally Implanted Hearing Device Systemmentioning

confidence: 99%

Mechanical Energy Sensing and Harvesting in Micromachined Polymer-Based Piezoelectric Transducers for Fully Implanted Hearing Systems: A Review

et al. 2021

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The paper presents a comprehensive review of mechanical energy harvesters and microphone sensors for totally implanted hearing systems. The studies on hearing mechanisms, hearing losses and hearing solutions are first introduced to bring to light the necessity of creating and integrating the in vivo energy harvester and implantable microphone into a single chip. The in vivo energy harvester can continuously harness energy from the biomechanical motion of the internal organs. The implantable microphone executes mechanoelectrical transduction, and an array of such structures can filter sound frequency directly without an analogue-to-digital converter. The revision of the available transduction mechanisms, device configuration structures and piezoelectric material characteristics reveals the advantage of adopting the polymer-based piezoelectric transducers. A dual function of sensing the sound signal and simultaneously harvesting vibration energy to power up its system can be attained from a single transducer. Advanced process technology incorporates polymers into piezoelectric materials, initiating the invention of a self-powered and flexible transducer that is compatible with the human body, magnetic resonance imaging system (MRI) and the standard complementary metal-oxide-semiconductor (CMOS) processes. The polymer-based piezoelectric is a promising material that satisfies many of the requirements for obtaining high performance implantable microphones and in vivo piezoelectric energy harvesters.

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“…Although often utilized in basic research. [ 177–179 ] its use in implantable device applications has been somewhat diminished by the presence of lead. [ 180 ] PZT are generally prepared as powders with different elemental ratios, which determine their crystal structures and ultimately the materials piezoelectric properties ( Figure [ 181 ] ), and are sintered to create bulk materials (Figure 3A3).…”

Section: Piezoelectric Materialsmentioning

confidence: 99%

Ultrasound‐Powered Implants: A Critical Review of Piezoelectric Material Selection and Applications

Turner

Senevirathne

Kilgour

et al. 2021

Adv Healthcare Materials

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Ultrasound‐powered implants (UPIs) represent cutting edge power sources for implantable medical devices (IMDs), as their powering strategy allows for extended functional lifetime, decreased size, increased implant depth, and improved biocompatibility. IMDs are limited by their reliance on batteries. While batteries proved a stable power supply, batteries feature relatively large sizes, limited life spans, and toxic material compositions. Accordingly, energy harvesting and wireless power transfer (WPT) strategies are attracting increasing attention by researchers as alternative reliable power sources. Piezoelectric energy scavenging has shown promise for low power applications. However, energy scavenging devices need be located near sources of movement, and the power stream may suffer from occasional interruptions. WPT overcomes such challenges by more stable, on‐demand power to IMDs. Among the various forms of WPT, ultrasound powering offers distinct advantages such as low tissue‐mediated attenuation, a higher approved safe dose (720 mW cm−2), and improved efficiency at smaller device sizes. This study presents and discusses the state‐of‐the‐art in UPIs by reviewing piezoelectric materials and harvesting devices including lead‐based inorganic, lead‐free inorganic, and organic polymers. A comparative discussion is also presented of the functional material properties, architecture, and performance metrics, together with an overview of the applications where UPIs are being deployed.

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Bulk PZT Cantilever Based MEMS Acoustic Transducer for Cochlear Implant Applications

Cited by 15 publications

References 7 publications

An Adaptable Interface Circuit With Multistage Energy Extraction for Low-Power Piezoelectric Energy Harvesting MEMS

An Adaptable Interface Circuit With Multistage Energy Extraction for Low-Power Piezoelectric Energy Harvesting MEMS

Mechanical Energy Sensing and Harvesting in Micromachined Polymer-Based Piezoelectric Transducers for Fully Implanted Hearing Systems: A Review

Ultrasound‐Powered Implants: A Critical Review of Piezoelectric Material Selection and Applications

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