Broadband Piston Mode Operation for First-order Antisymmetric Mode Resonators

Wong, Yu-Po; Qiu, Luyan; Matsuoka, Naoto; Hashimoto, Ken-ya

doi:10.1109/ius46767.2020.9251719

Cited by 18 publications

(13 citation statements)

References 11 publications

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“…Figure 4a shows three TMIM images near the 32nd overtone. The formation of transverse standing waves inside the resonant cavity is clearly seen at frequencies above the main tone 37 . The FEA simulated acoustic patterns of the fundamental, 2nd-order, and 3rd-order transverse modes are displayed in Fig.…”

Section: Furthermore the Phase Velocitymentioning

confidence: 93%

“…4b, which agrees with our measurement. Since higher-order transverse modes usually reduce the Q-factor of the fundamental mode, they should be avoided, or their frequencies should be pushed away from the main tone in the resonator design 37 . Note that these undesired spurious resonances are different from the ones due to the nonlinear dynamic response of the drive mode 38,39 .…”

Section: Furthermore the Phase Velocitymentioning

confidence: 99%

See 1 more Smart Citation

Nanoscale imaging of super-high-frequency microelectromechanical resonators with femtometer sensitivity

Lee

Jahanbani²,

Kramer³

et al. 2023

Nat Commun

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Implementing microelectromechanical system (MEMS) resonators calls for detailed microscopic understanding of the devices, such as energy dissipation channels, spurious modes, and imperfections from microfabrication. Here, we report the nanoscale imaging of a freestanding super-high-frequency (3 – 30 GHz) lateral overtone bulk acoustic resonator with unprecedented spatial resolution and displacement sensitivity. Using transmission-mode microwave impedance microscopy, we have visualized mode profiles of individual overtones and analyzed higher-order transverse spurious modes and anchor loss. The integrated TMIM signals are in good agreement with the stored mechanical energy in the resonator. Quantitative analysis with finite-element modeling shows that the noise floor is equivalent to an in-plane displacement of 10 fm/√Hz at room temperatures, which can be further improved under cryogenic environments. Our work contributes to the design and characterization of MEMS resonators with better performance for telecommunication, sensing, and quantum information science applications.

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Section: Furthermore the Phase Velocitymentioning

confidence: 93%

Section: Furthermore the Phase Velocitymentioning

confidence: 99%

Nanoscale imaging of super-high-frequency microelectromechanical resonators with femtometer sensitivity

Lee

Jahanbani²,

Kramer³

et al. 2023

Nat Commun

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show abstract

“…The crystal X-axis of LN is aligned to the coordinate x-axis so that side edges behave as mechanically free boundaries for shear-horizontal (SH) vibration. 33) When oblique propagation to the y direction is ignored, the resonances are categorized to two types: even and odd modes. These can be excited and detected selectively as shown in Figs.…”

Section: Basic Operation and Designmentioning

confidence: 99%

Wideband double-mode bulk acoustic wave resonator filters on lithium niobate using periodically slotted electrodes

Wu¹,

Wong²,

He³

et al. 2022

Jpn. J. Appl. Phys.

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This paper discusses applicability of periodically slotted electrodes for realization of wideband transversely-coupled double-mode resonator filters using lithium niobate (LN) thin plate. First, two-dimensional analysis is carried out, and it is shown that the periodic structure is effective to control the frequency separation between two resonance modes, and synthesis of the fractional bandwidth larger than 24% is achievable. Next, 3D analysis is performed for suppression of spurious resonances. It is shown that the mass loading at aperture edges is effective for the piston mode operation, and transverse modes can be well suppressed. It is also pointed out that the bottom electrode should be covered only the aperture region and removed from the busbar and gap regions for suppression of unwanted resonances. With these proper edge treatments, spurious-free and wide passband can be synthesized.

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“…However, that is not to say A1 spurious modes are a solved problem. Transverse and other eigenmodes that cannot be addressed by adjusting pitch width would have to be overcome by more innovative methods (e.g., recessed electrodes [57] or periodically installed release windows [58], [59]). Perhaps, the large k 2 seen in the modes only serves as a motivator for addressing technical kinks in harnessing these modes.…”

Section: Higher Coupling Operational Modesmentioning

confidence: 99%

Microwave Acoustic Devices: Recent Advances and Outlook

Gong

Yang

et al. 2021

IEEE J. Microw.

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This paper presents a short review of the microwave acoustics area, where exciting material innovations and performance advancements have been made in the past decade. The ever-growing demand for more sophisticated passive signal processing functions on-chip has fueled these developments. As a result, microwave acoustic devices have maintained performance leadership in mobile applications. By evaluating three fundamental parameters, namely electromechanical coupling (k 2 ), quality factors, and frequency scalability, of microwave acoustics, this paper aims to, extensively but not exhaustively, capture the rationales behind approaches achieving higher performance microsystems. Outlooks for different material systems and addressing their underlying challenges are also offered in hopes of establishing a balanced roadmap for future microwave acoustics development.

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Broadband Piston Mode Operation for First-order Antisymmetric Mode Resonators

Cited by 18 publications

References 11 publications

Nanoscale imaging of super-high-frequency microelectromechanical resonators with femtometer sensitivity

Nanoscale imaging of super-high-frequency microelectromechanical resonators with femtometer sensitivity

Wideband double-mode bulk acoustic wave resonator filters on lithium niobate using periodically slotted electrodes

Microwave Acoustic Devices: Recent Advances and Outlook

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