Broadband infrared Mueller-matrix ellipsometry for studies of structured surfaces and thin films

Furchner, Andreas; Walder, Cordula; Zellmeier, M.; Rappich, Jörg; Hinrichs, Karsten

doi:10.1364/ao.57.007895

Cited by 18 publications

(13 citation statements)

References 30 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…For IRSE, a novel custom built spectroscopic ellipsometer coupled with a Bruker Tensor 37 spectrometer was used . Samples were measured at seven angles of incidence (45, 50, 55, 60, 65, 70, and 75°) to optimally decorrelate film thickness and anisotropy.…”

Section: Methodsmentioning

confidence: 99%

Thin Composite Carbon Molecular Sieve Membranes from a Polymer of Intrinsic Microporosity Precursor

Ogieglo

Furchner

et al. 2019

ACS Appl. Mater. Interfaces

Self Cite

View full text Add to dashboard Cite

Ultra-thin composite carbon molecular sieve (CMS) membranes were fabricated on well-defined inorganic alumina substrates using a polymer of intrinsic microporosity (PIM) as a precursor. Details of the pyrolysis-related structural development were elucidated using focused-beam, interference-enhanced spectroscopic ellipsometry (both in the UV–vis and IR range), which allowed accurate determination of the film thickness, optical properties as well as following the chemical transformations. The pyrolysis-induced collapse of thin and bulk PIM-derived CMS membranes was compared with CMS made from a well-known non-PIM precursor 6FDA–DABA. Significant differences between the PIM and non-PIM precursors were discovered and explained by a much larger possible volume contraction in the PIM. In spite of the differences, surprisingly, the gas separation properties did not fundamentally differ. The high-temperature collapse of the initially amorphous and isotropic precursor structure was accompanied by a significant molecular orientation within the formed turbostratic carbon network guided by the laterally constraining presence of the substrate. This manifested itself in the development of uniaxial optical anisotropy, which was shown to correlate with increases in gas separation selectivity for multiple technologically important gas pairs. Reduction of CMS skin thickness significantly below ∼1 μm induced large losses in permeability coefficients with only small to moderate effects on selectivity. Remarkably, skin thickness reduction and physical aging seemed to superimpose onto the same trend, which explains and strengthens some of the earlier fundamental insights.

show abstract

Section: Methodsmentioning

confidence: 99%

Thin Composite Carbon Molecular Sieve Membranes from a Polymer of Intrinsic Microporosity Precursor

Ogieglo

Furchner

et al. 2019

ACS Appl. Mater. Interfaces

Self Cite

View full text Add to dashboard Cite

show abstract

“…We have adapted this approach for the presented ellipsometer and derived generalized equations that account for source polarization, polarizer diattenuation, and other nonidealities. 17 In practice, the pure polarization states are realized according to Fig. 2 by appropriate rotation of the polarizers to 0°/90°( linear polarization), to 45°/135°(linear diagonal polarization), or by combining the latter settings with a 90°phase-shifting retarder (circular polarization).…”

Section: B Measurement Principlementioning

confidence: 99%

“…The structures were prepared from an H = 1000 nm thick SiO 2 layer on a Si wafer by photolithographic processing with subsequent wet-chemical etching. 17 Their characteristic structure parameters are the trapezoid's period lengths (P x , P y ), base widths (B x , B y ), and top widths (T x , T y ).…”

Section: D-structured Trapezoidal Silica Arraysmentioning

confidence: 99%

See 1 more Smart Citation

Ultrasensitive broadband infrared 4 × 4 Mueller-matrix ellipsometry for studies of depolarizing and anisotropic thin films

Furchner

Kratz

Ogieglo

et al. 2019

Journal of Vacuum Science &Amp; Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phen

Self Cite

View full text Add to dashboard Cite

The authors present a second-generation broadband 4×4 Mueller-matrix (MM) ellipsometer for ultrasensitive infrared-spectroscopic (8000−800cm−1) studies of complex nanometer-thin films. In a modular design, the instrument employs retractable achromatic retarders and various sets of tandem polarizers. Using high-transmittance free-standing wire-grid polarizers, the device reaches an unparalleled precision of up to 5⋅10−5 in the important fingerprint region, even for block-offdiagonal MM elements. Broadband and signal-to-noise optimized access to the full 4×4 MM provides in-depth information on the sample’s polarimetric properties and opens the door for detailed explorations of depolarizing and anisotropic materials. The authors discuss examples of highly depolarizing nonuniform polyimide membranes, uniaxial-to-biaxial anisotropy changes in ultrathin polymer films, and azimuthal off-axis effects in 2D-structured silica arrays. Diverse optical modeling approaches based upon anisotropic layer stacks and rigorous coupled-wave analysis are used to quantify the optical, structural, and chemical properties of the sample.

show abstract

“…This method of analytical measurements is beginning to play an increasing role in various industrial and scientific industries [18]. SE finds application in such applications as the determination of the optical characteristics of thin films [22], in-situ monitoring of semiconductor thin films and their functionality [2,7], as well as currently topical surface probing in biochemical reactions [16,17]. In addition, ellipsometry provides exceptional measurement sensitivity, which makes it possible to use it for monitoring the epitaxial growth of thin films with submonolayer resolution [14,20].…”

Section: Introductionmentioning

confidence: 99%

ELIPSOMETRYCZNY SYSTEM SPEKTROSKOPOWY DO SZYBKIEJ OCENY SKŁADU CIENKICH WARSTW Bi2Te3-XSeX

Kovalev

Uvaysov

Bogucki

2021

IAPGOS

View full text Add to dashboard Cite

W artykule najpierw dokonano analizy porównawczej obecnego stanu rozwoju elipsometrii spektroskopowej oraz określono główne ograniczenia typowe dla popularnych konfiguracji urządzeń pomiarowych. Zaproponowano oryginalne rozwiązanie techniczne pozwalające na stworzenie dwuźródłowego elipsometu spektroskopowego z przełączaniem ortogonalnych stanów polaryzacji. Układ pomiarowy zapewnia wysoką precyzję pomiarów parametrów elipsometrycznych Ψ i Δ w zakresie spektralnym 270–2200 nm i prędkości wyznaczonej przez charakterystyki źródeł impulsowych przy prostej konstrukcji elipsometru. Jako obiekty do badań eksperymentalnych potwierdzających wydajność i wysoką precyzję proponowanego elipsometu spektroskopowego, wykorzystano ćwierćfalowy przyrząd GaAs/ZnS dla lasera CO2 oraz płytki kalibracyjne SiO2 na krzemie. Właściwości optyczne warstw Bi2Te3-xSex zbadano w zakresie 270–1000 nm przy użyciu wielokątowego elipsometu spektroskopowego. Wykazano, że właściwości optyczne cienkich warstw Bi2Te3-xSex zmieniają się monotonicznie w zależności od stosunku zawartości selenu i telluru.

show abstract

Broadband infrared Mueller-matrix ellipsometry for studies of structured surfaces and thin films

Cited by 18 publications

References 30 publications

Thin Composite Carbon Molecular Sieve Membranes from a Polymer of Intrinsic Microporosity Precursor

Thin Composite Carbon Molecular Sieve Membranes from a Polymer of Intrinsic Microporosity Precursor

Ultrasensitive broadband infrared 4 × 4 Mueller-matrix ellipsometry for studies of depolarizing and anisotropic thin films

ELIPSOMETRYCZNY SYSTEM SPEKTROSKOPOWY DO SZYBKIEJ OCENY SKŁADU CIENKICH WARSTW Bi2Te3-XSeX

Contact Info

Product

Resources

About