We have applied spectroscopic ellipsometry with binary polarization modulation to study the refractive index n(X) and extinction coefficient k(X) spectra of as-deposited and irradiated with nitrogen ions polymethylmethacrylate (PMMA) and polystyrene (PS) films in 300-1030 nm range. The results of performed investigation confirmed the possibility and estimate restrictions of the ion implantation for local change the refractive index of polymeric materials.
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