On the SiO2/Si (100) substrates, Bi3 gLao.1Ti2.9Vo.1O12 (BLTV) ferroelectric thin films were deposited to form a metal-ferroelectric-metal (MFM) structures and improved by the low temperature supercritical carbon dioxide fluid (SCCO2) post-treatment process. The dielectric and ferroelectric characteristics o f the as-deposited BLTV thin films were measured and investigated by the XPS, C-V, and J-E measurement. From the measured results, after the SCCO2 post-treatment, the capacitance, leakage current density, coercive field, and remnant polarization o f the BLTV thin films were all improved obviously. Finally, the mechanism concerning the dependence o f electrical properties o f the ferroelectric thin films was also investigated.