Bidirectional confocal measurement of a microsphere

Schaude, Janik; Baumgärtner, Benjamin; Hausotte, Tino

doi:10.1364/ao.436355

Cited by 5 publications

(7 citation statements)

References 33 publications

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“…If the measurement accuracy of micro-CMMs is supposed to be 50 nm, the diameter and shape should be measured as accurately as ~10 nm or less. Many techniques for measuring probe diameter and shape have been proposed [52][53][54][55][56][57][58][59][60][61][62]; however, few are accurate to 10 nm; Meli et al achieved a repeatability of 4 nm using two spheres and the probe tip [59,60]. This method has excellent repeatability and potential; however, the calibration process includes the traceability route, and therefore, a more straightforward on-machine measurement method is preferred.…”

Section: Issues For Microprobe Systemmentioning

confidence: 99%

Surface-Sensing Principle of Microprobe System for Micro-Scale Coordinate Metrology: A Review

Michihata

2022

Metrology

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Micro-coordinate measuring machines (micro-CMMs) for measuring microcomponents require a probe system with a probe tip diameter of several tens to several hundreds of micrometers. Scale effects work for such a small probe tip, i.e., the probe tip tends to stick on the measurement surface via surface adhesion forces. These surface adhesion forces significantly deteriorate probing resolution or repeatability. Therefore, to realize micro-CMMs, many researchers have proposed microprobe systems that use various surface-sensing principles compared with conventional CMM probes. In this review, the surface-sensing principles of microprobe systems were the focus, and the characteristics were reviewed. First, the proposed microprobe systems were summarized, and the probe performance trends were identified. Then, the individual microprobe system with different sensing principles was described to clarify the performance of each sensing principle. By comprehensively summarizing multiple types of probe systems and discussing their characteristics, this study contributed to identifying the performance limitations of the proposed micro-probe system. Accordingly, the future development of micro-CMMs probes is discussed.

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Section: Issues For Microprobe Systemmentioning

confidence: 99%

Surface-Sensing Principle of Microprobe System for Micro-Scale Coordinate Metrology: A Review

Michihata

2022

Metrology

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“…Optical methods have also been used for the measurements of microspheres [12][13][14][15]. Michihata et al [12] proposed a new method based on the whispering gallery modes (WGMs) of the sphere, which is a kind of non-imaging technique.…”

Section: Introductionmentioning

confidence: 99%

A feasibility study towards traceable calibration of size and form of microspheres by stitching AFM images using ICP point-to-plane algorithm

Dai

Degenhardt²,

Hu³

et al. 2023

Meas. Sci. Technol.

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We present a new method for traceable calibration of size and form error of microspheres, which was realised by stitching a series of atomic force microscopic (AFM) images measured at different orientations of microspheres using the metrological large range AFM of the PTB. The stitching algorithm is achieved using an iterative closest point (ICP) point-to-plane algorithm. As the AFM tip geometry is one of the most significant error sources for the developed method, it was traceably calibrated to a line width standard (type IVPS100-PTB), whose feature geometry was calibrated with a traceable route to the lattice constant of crystal silicon. Measurement setup, scan strategy, and data evaluation processes have been detailed in the paper. Measurement results show high stability and robustness of the developed method. For instance, the standard deviation of four repeated measurements reaches 5 nm, indicating promising performance.

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“…Although this method seems to enable a high precision [8], we are unaware of any comparison measurements to verify the complex models involved in analysing the data. Other strategies are limited to diameter measurements [10][11][12]. These include tactile [10] and optical ones [11,12].…”

Section: Introductionmentioning

confidence: 99%

“…Other strategies are limited to diameter measurements [10][11][12]. These include tactile [10] and optical ones [11,12]. However, measuring the diameter of a sphere leads to a loss of information, compared to radius measurements, since it does not include every form deviation.…”

Section: Introductionmentioning

confidence: 99%

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Influence of the reference surface and AFM tip on the radius and roundness measurement of micro spheres

Oertel,

Manske

2023

Meas. Sci. Technol.

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The performance of tactile and optical surface sensors for nano and micro coordinate measuring machines (CMMs) is currently limited by the lack of precisely characterized micro spheres, since established strategies have mainly been developed for spheres in the range of millimetres or above. Although the characterization of a full sphere has already been demonstrated, the investigations in this contribution are limited to equator measurements.We have, therefore, recently focused our research efforts towards a novel strategy for the characterization of spheres in the sub-millimetre range. It is based on a set of atomic force microscope (AFM) surface scans in conjunction with a stitching algorithm. To obtain an uncertainty statement, the uncertainty about the shape of the reference surface needs to be propagated via the shape of the AFM tip to the actual measurement object. However, the sampling process of an AFM is non-linear and the processing of AFM scans requires complex algorithms. We have, therefore, recently begun to model the characterization of micro spheres through simulations.In this contribution, this model is extended by the influence of the tip and reference surface. The influence of the tip's shape and reference surface is investigated through virtual and real experiments. The shape of the tip is varied by using tips with mean radii of 200 nm and 2 µm while sampling the same ruby sphere with a mean radius of 150 µm. In general, the simulation results imply that an uncertainty of less then 10 nm is achievable. However, an experimental validation of the model is still pending. The experimental investigations were limited by the lack of a suitable cleaning strategy for micro parts, which demonstrates the need for further investigations in this area.

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Bidirectional confocal measurement of a microsphere

Cited by 5 publications

References 33 publications

Surface-Sensing Principle of Microprobe System for Micro-Scale Coordinate Metrology: A Review

Surface-Sensing Principle of Microprobe System for Micro-Scale Coordinate Metrology: A Review

A feasibility study towards traceable calibration of size and form of microspheres by stitching AFM images using ICP point-to-plane algorithm

Influence of the reference surface and AFM tip on the radius and roundness measurement of micro spheres

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