skin, [3,4] stretchable displays, [5,6] and so on. In particular, mechanically deformable energy-harvesting [7,8] and energystorage [9][10][11] devices are crucial for achieving efficacy and portability. Unlike flexibility which can be achieved by thinning down the material such that the generated strain is below its fracture limit, stretchability may involve out-of-plane deformation and reversible change of material size and thus should be tackled differently. [12] The early demonstrations of stretchable energy devices such as batteries [13] and supercapacitors [14] are based on the dispersion of electronic components in inherently elastic materials such as elastomers. Bao and co-workers reported the first intrinsically stretchable solar cell using organic materials which can accommodate reversible strains up to 27% with a power conversion efficiency of â2%. [15] The development of different organic-based elastic photovoltaics followed; however, the major drawbacks lie in their environmental instability and low efficacy (below 8%). [16][17][18] In contrast, semiconductor based solar cells show higher efficiencies; however, they are inherently rigid and brittle. To overcome these constraints, various forms of shape engineering were developed such as serpentine, wavy, and stiff-island structures [19][20][21] which can achieve stretching due to different mechanisms such as out-of-plane deformation, buckling, and twisting. [22] The first inorganic semiconductor-based stretchable solar cell was reported by Rogers and co-workers where single junction GaAs microcells (3.6-Âľm-thick) were transferred onto a prestrained elastomer with downward buckled interconnects resulting in an efficiency of â13% with strains up to 20%. [23] In a follow-up work, the authors used ultrathin and geometrically structured dual junction GaInP-GaAs microcells to achieve 60% stretchability and 19% efficiency at the expense of a 33% loss of active area. [24] However, all of the demonstrated inorganic semiconductor based stretchable photovoltaics necessitate an aligned transfer printing of the ultrathin and patterned inorganic material from a crystalline wafer onto a prestrained elastic substrate with good adhesion and low alignment mismatch. [25] Previously, we demonstrated a deep reactive ion etching (DRIE) based linear-corrugation technique to convert rigid solar cells Stretchable solar cells are of growing interest due their key role in realizing many applications such as wearables and biomedical devices. Ultrastretchability, high energy-efficiency, biocompatibility, and mechanical resilience are essential characteristics of such energy harvesting devices.
Here, the development of wafer-scale monocrystalline silicon solar cells with world-record ultrastretchability (95%) and efficiency (19%) is demonstrated using a laser-patterning based corrugation technique. The demonstrated approach transforms interdigitated back contacts (IBC) based rigid solar cells into mechanically reliable but ultrastretchable cells with negligible degradation in the...