Bi-directional extended range parallel plate electrostatic actuator based on feedback linearization

Moreira, Eurico Esteves; Alves, Filipe; Dias, Rosana A.; Costa, Margaret; Fonseca, Hélder; Cabral, Jorge; Gaspar, J.; Rocha, Licinio

doi:10.1109/memsys.2015.7051139

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Kinematics Of Ppas1

Active Vibration Isolator Using Spring Softening Effect1

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Cited by 4 publications

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“…Thus, it is simple to adjust its resonant frequency by changing V act to prevent external disturbances from matching its original natural frequency. However, PPAs have a limited stable travelling range (less than one third of the initial gap x 0 ) [10]. If the external disturbance's amplitude is large, it may cause the two electrodes to snap to each other where they cannot be separated again.…”

Section: Kinematics Of Ppasmentioning

confidence: 99%

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Active vibration isolator based on micromachined electrostatic actuators

Li¹,

Yang²,

Dean³

et al. 2016

Micro & Nano Letters

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Parallel plate actuators (PPAs) are widely used actuators in microelectromechanical systems. A PPA can be utilised as a passive/active vibration isolator. A novel active vibration isolator with a simple structure, which requires a constant voltage source and series capacitor, is proposed. The principle of the spring softening effect is analysed, which can avoid a specific external disturbance by changing its resonant frequency. A simulation study was performed to verify the feasibility of this type of isolator.

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Section: Kinematics Of Ppasmentioning

confidence: 99%

“…However, PPAs have a limited stable travelling range (less than one third of the initial gap x 0 ) [10]. If the external disturbance's amplitude is large, it may cause the two electrodes to snap to each other where they cannot be separated again.…”

Section: Active Vibration Isolator Using Spring Softening Effectmentioning

confidence: 99%