BaTiO₃ based relaxor ferroelectric epitaxial thin-films for high-temperature operational capacitors

Abstract

The epitaxial growth of 0.6[BaTiO 3 ]-0.4[Bi(Mg 2/3 Nb 1/3 )O 3 ] (BT-BMN) relaxor ferroelectric thin-films on (100) Nb doped SrTiO 3 substrates has been achieved and the structure is investigated for high-temperature capacitor applications. The post growth annealing decreases the oxygen vacancy and other defects in BT-BMN films, resulting in the enhancement of dielectric constant. An insertion of intermediate SrRuO 3 layers as an electrode instead of Pt, sandwiching the film, is found to be more effective in enhancing the dielectric constant. A very high dielectric constant exceeding 400 was achieved from high-temperature annealed film and the film showed an excellent dielectric constant stability of below 11% in the temperature range of 80-400°C. This will enable smaller, high-temperature tolerant, monolithically integrated thin-film capacitors on power semiconductor devices.

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