Batch welding of aligned carbon nanotube onto metal electrodes

Abstract

A novel batch welding of aligned carbon nanotubes (CNTs) onto metallic electrodes is developed by radio frequency induction heating. The experiments had achieved optimum contact between CNTs and metal electrodes, two hundred samples had the same trend of reduction of contact resistance after heating process, and this reduction was irreversible, which demonstrated good reproducibility of induction heating for CNT welding. Because of its non-contact and selective heating, induction heating provide a potential approach to reproducible large-scale fabrication and wide applications of CNTs devices.

One‐Dimensional Nano‐Interconnection Formation

“…However, the high temperature that is needed for conducting carbides formation may bring destruction to other components. Recently, batch welding technique ( Figure ) has been proposed by Chen and co‐workers, where local heat induced by eddy current replaces the heat process to whole devices exhibiting great promising in the large scale application 46…”

“… Schematic illustration of batch welding process. Reproduced with permission 46. Copyright 2012, Springer.…”

Platinum and palladium on carbon nanotubes: Experimental and theoretical studies

“…Research on the physical and chemical properties of carbon nanotubes (CNTs) has been stimulated by extensive reports on their potential use as active component of novel devices [1][2][3][4][5]. In particular, CNTs showing optimal charge transport properties are promising candidates for replacing copper interconnects in nanoelectronics circuits provided that the Schottky barrier that forms at the interface between the CNT surface and the electrical contact can be engineered [6].…”

On Contact Resistance of Carbon Nanotubes

“…Chen et al [59] developed a novel batch welding of aligned CNTs onto electrodes by radio frequency induction heating in vacuum. After the induction heating process, the measured resistance values by two-terminal method were in the range of 15-30 kΩ, a considerable decrease compared to the initial range of 1-3 MΩ before the treatment.…”

“…Various techniques for reducing contact resistance are summarized in Table 2. Thermal annealing combined with HF treatment 1.5 kΩ [27] Electric current flowing DC current flow through electrodes 15-50 kΩ [55] Electrical pulse flow through electrodes 66 kΩ [57] Radio frequency induction heating 15-30 kΩ [59] Electron beam irradiation Electron beam exposed to the contact area 30 kΩ [21] Selective electron irradiation under DC condition <250 kΩ [60] Elimination of contamination HF treatment combined with CMP and thermal annealing 85 Ω (total resistance) [29] Ultrasonic bonding Ultrasonic bonding 8-24 kΩ/μm [62] Hydrocarbon deposition Electron beam induced deposition of hydrocarbon molecules ≈ 550 kΩ [65] Carbon deposition Carbon molecule deposition [44] Modest pressure Pressure on CNT-metal contact area 121 kΩ [69] Pressure on CNT tangles 100 kΩ [70]…”