Batch fabrication of carbon nanotubes on tips of a silicon pyramid array

Takagahara, Kazuhiko; Takei, Yusuke; Matsumoto, Kiyoshi; Shimoyama, Isao

doi:10.1109/memsys.2007.4433180

Cited by 4 publications

(4 citation statements)

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“…A higher precision for positioning the CNTs is obtained when the intensity of the electric field is increased by utilising sharp Si pyramids. 192 A tetramethyl ammonium hydroxide (TMAH) based etching step is used to anisotropically etch Si and create the pyramids. This is followed by thermal oxidation and catalyst layer (iron and cobalt) deposition.…”

Section: Growth Studiesmentioning

confidence: 99%

“…278 The level of difficulty associated with this kind of assembly becomes clear when one compares the attachment of a CNT on to a Si tip through manipulation inside an SEM 66 and the growth of CNTs on multiple Si tips through CVD in an electric field. 192…”

Section: Manipulationmentioning

confidence: 99%

“…Two such examples were already mentioned previously in the section on 'Directional growth', where nanopores were created by photolithography and each pore was utilised as a growth site of a single CNT 241 or CNTs were grown on top of Si pyramids formed through TMAH etching. 192 Let us start with timed etching as a natural extension of photolithography, although the level of control on dimensions is rather limited. Starting with a micrometre sized etch mask, one can etch the structural layer with a careful timing for achieving a certain undercut.…”

Section: Batch Compatible Techniquesmentioning

confidence: 99%

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Integration of one-dimensional nanostructures with microsystems: an overview

Alaca

2009

International Materials Reviews

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The current state of solutions provided for the issue of integration between micro-and nanoscales is reviewed for the specific case of nanowires and nanotubes. Such structures serve as field emitters, transistors or laser sources, digits for manipulation and handling, as sensing elements or as agents for the modification of surface properties such as the adhesive strength. However, it is noteworthy that the majority of reported device work remains confined to component level prototype development without the prospect of full scale system integration due to the lack of batch compatible fabrication and processing techniques. On the one hand, nanostructures made by self-assembly do not possess a high level of control on their orientation and numbers, and hence, their interfacing and integration with a microsystem pose difficulties. On the other hand, top-down approaches such as manipulation, serial deposition and high resolution lithographic techniques do not satisfy the needs of large scale fabrication due to their expensive and/or nonparallel working principles. These techniques along with hybrid approaches taking advantage of the structural control of self-assembly and geometric control of high resolution lithography will be discussed and major applications will be highlighted to shed light on the capabilities and limitations associated with each process.

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Section: Growth Studiesmentioning

confidence: 99%

Section: Manipulationmentioning

confidence: 99%

Section: Batch Compatible Techniquesmentioning

confidence: 99%

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Integration of one-dimensional nanostructures with microsystems: an overview

Alaca

2009

International Materials Reviews

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“…In literature several other methods are often described such as the attachment of a carbon nano tube to a tip [33][34][35], or focused ion beam etching [36,37] and electron beam etching [36] of a sharp tip. These methods are however not considered here, as these methods work only in a serial fashion, thus one tip is etched at the time using focused ion beam etching, for example.…”

Section: Tip Fabrication Methodsmentioning

confidence: 99%

Advanced micromachining schemes for scanning probe tips

Vermeer¹

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The research presented in this dissertation was carried out partly at the Transducers Science & Technology group, partly at the Mesoscale Chemical Systems group, both at the MESA + Institute for Nanotechnology at the University of Twente, Enschede, the Netherlands. This thesis is part of NanoNextNL, a micro and nanotechnology innovation consortium of the Government of the Netherlands and 130 partners from academia and industry. More information on www.nanonextnl.nl. ("Tetratip AFM probe", project number 09A.08

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