Advanced micromachining schemes for scanning probe tips

Abstract

The research presented in this dissertation was carried out partly at the Transducers Science & Technology group, partly at the Mesoscale Chemical Systems group, both at the MESA + Institute for Nanotechnology at the University of Twente, Enschede, the Netherlands. This thesis is part of NanoNextNL, a micro and nanotechnology innovation consortium of the Government of the Netherlands and 130 partners from academia and industry. More information on www.nanonextnl.nl. ("Tetratip AFM probe", project number 09A.08