2008
DOI: 10.1143/jjap.47.5429
|View full text |Cite
|
Sign up to set email alerts
|

Basal Plane Stacking-Fault Related Anisotropy in X-ray Rocking Curve Widths of m-Plane GaN

Abstract: A model of basal plane stacking faults as boundaries between incoherently scattering domains in m-plane GaN films is reviewed. m-Plane GaN films are analyzed with a modified version of the Williamson-Hall analysis in order to determine the length-scale of coherent scattering and tilt-mosaic contribution to X-ray rocking curve widths for the primary in-plane directions. This analysis shows that basal plane stacking faults are the predominant source of rocking-curve width anisotropy in the m-plane films, and ind… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
1

Citation Types

6
120
1

Year Published

2010
2010
2024
2024

Publication Types

Select...
7

Relationship

0
7

Authors

Journals

citations
Cited by 106 publications
(127 citation statements)
references
References 19 publications
6
120
1
Order By: Relevance
“…Basal plane stacking faults ͑BPSFs͒ are among the most abundant defects in nonpolar nitride films, in particular the intrinsic I 1 -type BPSFs. 15,17,18,33 However, the two accessible on-axis reflections for a-plane InN, i.e., ͑1120͒ and ͑2240͒, are unaffected by the BPSF. 18,27 Therefore, the respective Williamson-Hall plots would give LCLs that are greatly overestimated.…”
Section: A Assessment Of Film Structure By Xrdmentioning
confidence: 99%
See 3 more Smart Citations
“…Basal plane stacking faults ͑BPSFs͒ are among the most abundant defects in nonpolar nitride films, in particular the intrinsic I 1 -type BPSFs. 15,17,18,33 However, the two accessible on-axis reflections for a-plane InN, i.e., ͑1120͒ and ͑2240͒, are unaffected by the BPSF. 18,27 Therefore, the respective Williamson-Hall plots would give LCLs that are greatly overestimated.…”
Section: A Assessment Of Film Structure By Xrdmentioning
confidence: 99%
“…[13][14][15][16] Similar azimuth dependence of the on-axis ͑1100͒ RC FWHM has also been reported for m-plane GaN films. 17 The anisotropic behavior of the RC FWHM in nonpolar GaN films was attributed to the combined or sole effect of anisotropic distribution of dislocations, 14,15 tilt, 15 wafer bending, 16 and stacking faults. 17,18 Surface roughness was also shown to affect the RC broadening 18 observed anisotropy.…”
Section: Introductionmentioning
confidence: 99%
See 2 more Smart Citations
“…Strain state analyses revealed that the use of thin QWs (d QW ¼ (1.5 6 0.2) nm) results in a small degree of relaxation well below 10%, which allows us to treat the structures as fully strained in the further discussion. In addition, a modified Williamson-Hall analysis of the x-ray rocking curve widths 17 was used to determine the stacking fault density in our samples. While the BSF density of the structures on bulk GaN was below the detection limit of about 1 Â 10 4 cm À1 , 17 we found a stacking fault density of about 1 Â 10 6 cm À1 in the samples on m-plane SiC in good agreement with TEM measurements.…”
mentioning
confidence: 99%