Autonomously Self‐Reporting Hard Coatings: Tracking the Temporal Oxidation Behavior of TiN by In Situ Sheet Resistance Measurements

Stelzer, Bastian; Momma, Markus; Schneider, Jochen M.

doi:10.1002/adfm.202000146

Cited by 10 publications

(4 citation statements)

References 32 publications

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“…Despite the presence of Ag segregations on the surface of the films deposited at 60 °C, the resistivity marginally increased with increasing Ag content. The fact that, due to lack of thermal activation, no Ag segregates can form in the bulk of the film may be re- Previously, electrical resistivity has been employed to track phase transitions within Cr 2 AlC [46] and the oxidation behavior of TiN and V 2 AlC [47,48]. In this work, we show for the first time, that the formation of Ag segregations in sputtered ZrCuAlNi metallic glass thin films can be tracked by resistivity measurements.…”

Section: Resultsmentioning

confidence: 85%

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Ag Surface and Bulk Segregations in Sputtered ZrCuAlNi Metallic Glass Thin Films

et al. 2022

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We report on the formation of Ag-containing ZrCuAlNi thin film metallic glass (nano)composites by a hybrid direct-current magnetron sputtering and high-power pulsed magnetron sputtering process. The effects of Ag content, substrate temperature and substrate bias potential on the phase formation and morphology of the nanocomposites were investigated. While applying a substrate bias potential did not strongly affect the morphological evolution of the films, the Ag content dictated the size and distribution of Ag surface segregations. The films deposited at low temperatures were characterized by strong surface segregations, formed by coalescence and Ostwald ripening, while the volume of the films remained featureless. At higher deposition temperature, elongated Ag segregations were observed in the bulk and a continuous Ag layer was formed at the surface as a result of thermally enhanced surface diffusion. While microstructural observations have allowed identifying both surface and bulk segregations, an indirect method for detecting the presence of Ag segregations is proposed, by measuring the electrical resistivity of the films.

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Section: Resultsmentioning

confidence: 85%

“…Previously, electrical resistivity has been employed to track phase transitions within Cr 2 AlC [ 46 ] and the oxidation behavior of TiN and V 2 AlC [ 47 , 48 ]. In this work, we show for the first time, that the formation of Ag segregations in sputtered ZrCuAlNi metallic glass thin films can be tracked by resistivity measurements.…”

Section: Resultsmentioning

confidence: 99%

Ag Surface and Bulk Segregations in Sputtered ZrCuAlNi Metallic Glass Thin Films

et al. 2022

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“…A potential synthesis pathway for a composite has been demonstrated by oxidizing TiN thin films, where the time-and temperature-dependent formation of a TiO 2 scale on top of TiN was observed with varying thickness, and hence phase fraction ratios [67,68]. Consequently, the first synthesis strategy to form HfV 2 -HfV 2 O 7 composites comprises synthesis of HfV 2 and subsequent heat treatment in air to partly oxidize HfV 2 in an attempt to form a HfV 2 O 7 oxide scale on top.…”

Section: Composite Formation By Oxidation Of Hfvmentioning

confidence: 99%

A Proposal for a Composite with Temperature-Independent Thermophysical Properties: HfV2–HfV2O7

et al. 2020

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The HfV2–HfV2O7 composite is proposed as a material with potentially temperature-independent thermophysical properties due to the combination of anomalously increasing thermoelastic constants of HfV2 with the negative thermal expansion of HfV2O7. Based on literature data, the coexistence of both a near-zero temperature coefficient of elasticity and a coefficient of thermal expansion is suggested for a composite with a phase fraction of approximately 30 vol.% HfV2 and 70 vol.% HfV2O7. To produce HfV2–HfV2O7 composites, two synthesis pathways were investigated: (1) annealing of sputtered HfV2 films in air to form HfV2O7 oxide on the surface and (2) sputtering of HfV2O7/HfV2 bilayers. The high oxygen mobility in HfV2 is suggested to inhibit the formation of crystalline HfV2–HfV2O7 composites by annealing HfV2 in air due to oxygen-incorporation-induced amorphization of HfV2. Reducing the formation temperature of crystalline HfV2O7 from 550 °C, as obtained upon annealing, to 300 °C using reactive sputtering enables the synthesis of crystalline bilayered HfV2–HfV2O7.

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“…It results, among other factors, from the morphology of thin films. It can be modified with oxidation [18] or photochemical oxidation [19]. The low sheet resistance could benefit conductor applications, such as those in [20][21][22].…”

Section: Introductionmentioning

confidence: 99%

Influence of Structural Defects on the Resistivity and Current Flow Field in Conductive Thin Layers

2020

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The paper presents an analysis of the influence of microcracks in textronic conductive layers on their conductive properties. The tested structures were created in the physical vacuum deposition process. The paper presents the results of computer simulations of the current flow field in thin conductive stripes with defects distributed along a line perpendicular to the stripe axis and randomly placed on its entire surface. It was found, inter alia, that a larger number of shorter collinear defects may have many times lower resistance than a small number of longer defects of the same total length (e.g., with 40 collinear cracks with a total length of 90% of the strip width, the sheet resistance is only about 3% greater compared to a track without cracks). It was found that the percolation threshold of the tested models with square proportions and randomly selected defects is close to the value of 0.5. This is consistent with the theoretical calculations for analogous discrete models with infinite sizes. It was also found that the sheet resistance of the conductive strip with randomly distributed defects clearly depends on its length when the defect concentration exceeds 20%. The simulations were carried out on the basis of the integral equation method, with the solution presented in the form of double layer potentials.

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Autonomously Self‐Reporting Hard Coatings: Tracking the Temporal Oxidation Behavior of TiN by In Situ Sheet Resistance Measurements

Cited by 10 publications

References 32 publications

Ag Surface and Bulk Segregations in Sputtered ZrCuAlNi Metallic Glass Thin Films

Ag Surface and Bulk Segregations in Sputtered ZrCuAlNi Metallic Glass Thin Films

A Proposal for a Composite with Temperature-Independent Thermophysical Properties: HfV2–HfV2O7

Influence of Structural Defects on the Resistivity and Current Flow Field in Conductive Thin Layers

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