Autonomous Robotic Pick-and-Place of Microobjects

Zhang, Yong; Chen, B.K.; Liu, Xinyu; Sun, Yu

doi:10.1109/tro.2009.2034831

Cited by 158 publications

(27 citation statements)

References 34 publications

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“…The constantly growing need for high-precision micromanipulation has seen the implementation of microelectromechanical systems (MEMS) in numerous applications within the micromanufacturing and biomedical fields. Microgrippers are one such type of MEMS devices that are typically designed to safely manipulate biological cells [1][2][3][4][5][6][7][8][9] as well as micromechanical parts [10][11][12]. The successful development of a MEMS microgripper depends on taking into account several factors including the design and mechanical structure [13], the actuation mechanism [14,15], the choice of materials used [16][17][18][19], the operational requirements and limitations [20], the fabrication technology [21][22][23][24][25][26], and the environment in which the microgripper will be operated [27].…”

Section: Introductionmentioning

confidence: 99%

The Effects of Structure Thickness, Air Gap Thickness and Silicon Type on the Performance of a Horizontal Electrothermal MEMS Microgripper

et al. 2018

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The ongoing development of microelectromechanical systems (MEMS) over the past decades has made possible the achievement of high-precision micromanipulation within the micromanufacturing, microassembly and biomedical fields. This paper presents different design variants of a horizontal electrothermally actuated MEMS microgripper that are developed as microsystems to micromanipulate and study the deformability properties of human red blood cells (RBCs). The presented microgripper design variants are all based on the U-shape 'hot and cold arm' actuator configuration, and are fabricated using the commercially available Multi-User MEMS Processes (MUMPs R ) that are produced by MEMSCAP, Inc. (Durham, NC, USA) and that include both surface micromachined (PolyMUMPs TM ) and silicon-on-insulator (SOIMUMPs TM ) MEMS fabrication technologies. The studied microgripper design variants have the same in-plane geometry, with their main differences arising from the thickness of the fabricated structures, the consequent air gap separation between the structure and the substrate surface, as well as the intrinsic nature of the silicon material used. These factors are all inherent characteristics of the specific fabrication technologies used. PolyMUMPs TM utilises polycrystalline silicon structures that are composed of two free-standing, independently stackable structural layers, enabling the user to achieve structure thicknesses of 1.5 µm, 2 µm and 3.5 µm, respectively, whereas SOIMUMPs TM utilises a 25 µm thick single crystal silicon structure having only one free-standing structural layer. The microgripper design variants are presented and compared in this work to investigate the effect of their differences on the temperature distribution and the achieved end-effector displacement. These design variants were analytically studied, as well as numerically modelled using finite element analysis where coupled electrothermomechanical simulations were carried out in CoventorWare R (Version 10, Coventor, Inc., Cary, NC, USA). Experimental results for the microgrippers' actuation under atmospheric pressure were obtained via optical microscopy studies for the PolyMUMPs TM structures, and they were found to be conforming with the predictions of the analytical and numerical models. The focus of this work is to identify which one of the studied design variants best optimises the microgripper's electrothermomechanical performance in terms of a sufficient lateral tip displacement, minimum out-of-plane displacement at the arm tips and good heat transfer to limit the temperature at the cell gripping zone, as required for the deformability study of RBCs.

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Section: Introductionmentioning

confidence: 99%

The Effects of Structure Thickness, Air Gap Thickness and Silicon Type on the Performance of a Horizontal Electrothermal MEMS Microgripper

et al. 2018

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“…Yet the release precision is poor. Sun et al presented a novel MEMS gripper with a plunging structure for releasing the objects adhered to a gripping arm [20]. Although these triple-arm grippers are able to releasing the microspheres, the temporary impact of the plunging arm is so strong that the structure of some soft micro-objects may be damaged.…”

Section: Introductionmentioning

confidence: 99%

A PZT Actuated Triple-Finger Gripper for Multi-Target Micromanipulation

et al. 2017

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This paper presents a triple-finger gripper driven by a piezoceramic (PZT) transducer for multi-target micromanipulation. The gripper consists of three fingers assembled on adjustable pedestals with flexible hinges for a large adjustable range. Each finger has a PZT actuator, an amplifying structure, and a changeable end effector. The moving trajectories of single and double fingers were calculated and finite element analyses were performed to verify the reliability of the structures. In the gripping experiment, various end effectors of the fingers such as tungsten probes and fibers were tested, and different micro-objects such as glass hollow spheres and iron spheres with diameters ranging from 10 to 800 μm were picked and released. The output resolution is 145 nm/V, and the driven displacement range of the gripper is 43.4 μm. The PZT actuated triple-finger gripper has superior adaptability, high efficiency, and a low cost.

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“…Since the first silicon microgripper was developed and proposed by Kim et al in 1990 [5], several prototype miniature grippers have been designed and fabricated. The research trend on microgrippers has evolved toward a micromechatronic system by including force sensing and servo control [6][7][8][9][10][11]. In the industries of information, material, and biomedical engineering, microgrippers that are capable of handling small objects have many important applications [6,7,[12][13][14][15].…”

Section: Introductionmentioning

confidence: 99%

Design and Implementation of Micro Mechatronic Systems- SMA Drive Polymer Microgripper

Chang¹,

Lai²

2017

Design, Control and Applications of Mechatronic Systems in Engineering

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A micromechatronic gripper was designed, fabricated, and tested with the proposed control system. By following realization axioms, the microgripper system including a polyurethane (PU) gripper mechanism and shape memory alloy (SMA) actuator was designed and developed. The micromechatronic gripper system was realized with crosssectional area of (π/4) × 500 2 μm 2 for clean room operation. A synergetic operation of SMA actuator for driving microgripper mechanism was investigated in visual-based control. By incorporating with inverse Preisach compensator, an explicit self-tuning controller through Ziegler-Nichols criterion was selected for controlling the self-biased SMA actuator. The application of the gripper system for gripping and transporting a glass particle of 30 μm was tested.

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Autonomous Robotic Pick-and-Place of Microobjects

Cited by 158 publications

References 34 publications

The Effects of Structure Thickness, Air Gap Thickness and Silicon Type on the Performance of a Horizontal Electrothermal MEMS Microgripper

The Effects of Structure Thickness, Air Gap Thickness and Silicon Type on the Performance of a Horizontal Electrothermal MEMS Microgripper

A PZT Actuated Triple-Finger Gripper for Multi-Target Micromanipulation

Design and Implementation of Micro Mechatronic Systems- SMA Drive Polymer Microgripper

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