A PZT Actuated Triple-Finger Gripper for Multi-Target Micromanipulation

Chen, Tao; Wang, Yaqiong; Yang, Zhan; Liu, Huicong; Jinyong, Liu; Sun, Lining

doi:10.3390/mi8020033

Cited by 29 publications

(9 citation statements)

References 20 publications

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“…With the rapid development of micro-/nanotechnology, piezoelectric-actuated, flexure hinge-based compliant platforms are now used across a wide spectrum of fields, including nanopositioning systems [ 1 , 2 ], ultra-precision manufacturing [ 3 , 4 ], scanning probe microscopes [ 5 ], and biomedical cell micro-manipulation [ 6 , 7 ]. The reasons for the promise of these applications are mainly attributed to the combination of the piezoelectric actuator (PZT) and flexure hinge-based compliant mechanisms.…”

Section: Introductionmentioning

confidence: 99%

Modelling and Analysis of Characteristics of a Piezoelectric-Actuated Micro-/Nano Compliant Platform Using Bond Graph Approach

et al. 2018

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The piezoelectric-actuated flexure-based compliant platform is commonly adopted in many fields of micro and nanotechnology. In this paper, bond graph modeling, and kinematic and dynamic characteristics of a piezoelectric-actuated micro-/nano compliant platform system are investigated. During modeling, the bond graph model of the piezoelectric actuator (PZT) is derived by considering both the electrical domain and the mechanical domain. Considering the compliances of flexure hinges and elastic linkages, as well as the input ends, the bond graph model for the bridge-type displacement amplification mechanism in the compliant platform is established by combining pseudo-rigid-body (PRB) model theory and elastic beam theory. Based on the interactions between the PZT subsystem and compliant platform subsystem, the kinematic performance of the proposed compliant platform system is evaluated through both computer simulations and experimental tests. Furthermore, the frequency responses, dynamic responses and load capacity of the compliant platform system are studied. This paper explores a new modeling method for a piezoelectric-actuated compliant platform system, which can provide an effective solution when analyzing the micro-/nano system.

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Section: Introductionmentioning

confidence: 99%

Modelling and Analysis of Characteristics of a Piezoelectric-Actuated Micro-/Nano Compliant Platform Using Bond Graph Approach

et al. 2018

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“…Moreover, they are simple, compact, and offer a high stiffness. They are, therefore, perfectly well adapted to challenging applications, such as nanopositioning [ 13 , 14 , 15 ]. For example, Zhang et al [ 16 ] presented a two-DOF (degree of freedom) rotary-linear actuator based on the stick-slip principle, which could achieve both linear displacement and angular displacement with the sequential coordination of three piezoelectric stacks.…”

Section: Introductionmentioning

confidence: 99%

Design and Experimental Research of a Novel Stick-Slip Type Piezoelectric Actuator

Zhou

Fan

et al. 2017

Micromachines

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A linear piezoelectric actuator based on the stick-slip principle is presented and tested in this paper. With the help of changeable vertical preload force flexure hinge, the designed linear actuator can achieve both large travel stick-slip motion and high-resolution stepping displacement. The developed actuator mainly consists of a bridge-type flexure hinge mechanism, a compound parallelogram flexure hinge mechanism, and two piezoelectric stacks. The mechanical structure and motion principle of the linear actuator were illustrated, and the finite element method (FEM) is adopted. An optimal parametric study of the flexure hinge is performed by a finite element analysis-based response surface methodology. In order to investigate the actuator’s working performance, a prototype was manufactured and a series of experiments were carried out. The results indicate that the maximum motion speed is about 3.27 mm/s and the minimum stepping displacement is 0.29 μm. Finally, a vibration test was carried out to obtain the first natural frequency of the actuator, and an in situ observation was conducted to investigate actuator’s stick-slip working condition. The experimental results confirm the feasibility of the proposed actuator, and the motion speed and displacement are both improved compared with the traditional stick-slip motion actuator.

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“…In recent decades, piezoelectric actuators (PZTs) have been frequently used in micro/nano-applications including advanced manufacturing, high precision positioning, scanning probe microscopes and biological cell manipulation [ 1 , 2 , 3 , 4 ]. The advantages of piezoelectric actuators include precise motion capability, compact size and large blocking force.…”

Section: Introductionmentioning

confidence: 99%

Development of Piezo-Driven Compliant Bridge Mechanisms: General Analytical Equations and Optimization of Displacement Amplification

Wei

Shirinzadeh

et al. 2017

Micromachines

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Compliant bridge mechanisms are frequently utilized to scale micrometer order motions of piezoelectric actuators to levels suitable for desired applications. Analytical equations have previously been specifically developed for two configurations of bridge mechanisms: parallel and rhombic type. Based on elastic beam theory, a kinematic analysis of compliant bridge mechanisms in general configurations is presented. General equations of input displacement, output displacement, displacement amplification, input stiffness, output stiffness and stress are presented. Using the established equations, a piezo-driven compliant bridge mechanism has been optimized to maximize displacement amplification. The presented equations were verified using both computational finite element analysis and through experimentation. Finally, comparison with previous studies further validates the versatility and accuracy of the proposed models. The formulations of the new analytical method are simplified and efficient, which help to achieve sufficient estimation and optimization of compliant bridge mechanisms for nano-positioning systems.

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A PZT Actuated Triple-Finger Gripper for Multi-Target Micromanipulation

Cited by 29 publications

References 20 publications

Modelling and Analysis of Characteristics of a Piezoelectric-Actuated Micro-/Nano Compliant Platform Using Bond Graph Approach

Modelling and Analysis of Characteristics of a Piezoelectric-Actuated Micro-/Nano Compliant Platform Using Bond Graph Approach

Design and Experimental Research of a Novel Stick-Slip Type Piezoelectric Actuator

Development of Piezo-Driven Compliant Bridge Mechanisms: General Analytical Equations and Optimization of Displacement Amplification

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